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Spray rinsing tank

A technology of spray cleaning and spray pipes, which is applied in the field of spray cleaning tanks, can solve the problems of low efficiency, slow cleaning process, and inability of cleaning equipment to achieve comprehensive cleaning, etc., and achieve the effect of convenient use and high work efficiency

Active Publication Date: 2014-05-14
SHANGHAI SINYANG SEMICON MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But the cleaning equipment in the prior art can't meet the requirement of comprehensive cleaning
And the cleaning process is slow and inefficient

Method used

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  • Spray rinsing tank
  • Spray rinsing tank
  • Spray rinsing tank

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0052] The present invention is described in detail below in conjunction with accompanying drawing:

[0053] like figure 1 , figure 2 , image 3 and Figure 4 As shown, the spray cleaning tank includes a tank body 100 , and the tank body 100 is provided with a cavity 101 . A first bracket 200 is also included. The first bracket 200 is movably disposed in the cavity 101 . Two rotatable clamps 300 are installed on the first bracket 200 . The clamp 300 is used to clamp the workpiece to be washed. Two clamps 300 are respectively arranged on two sides of the first bracket 200 .

[0054] Two shower pipes 400 are arranged in the cavity 101 . Each spray pipe 400 is provided with a liquid spray port 401 . The liquid spray port 401 of each spray pipe 400 faces one of the fixtures 300 . The two shower pipes 400 are arranged in the cavity 101 so as to reciprocate up and down.

[0055] like figure 2 , image 3 and Figure 4 As shown, the first bracket 200 is reciprocally mo...

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PUM

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Abstract

The invention discloses a spray rinsing tank, which comprises a tank body provided with a containing cavity, and is characterized by further comprising a first support, fixtures and spray pipes, wherein the first support is movably arranged in the containing cavity, the fixtures are used for clamping workpieces to be rinsed and rotatably arranged on the first support, and each spray pipe is provided with a spray opening facing the corresponding workpiece to be rinsed. The spray rinsing tank can utilize the fixtures to clamp the workpieces to be rinsed to rotate, the fixtures and the spray pipes can relatively and independently move, and spray water can rinse all positions of each workpiece to be rinsed. The spray rinsing tank is high in efficiency as two workpieces to be rinsed can be clamped once. Besides, when the spray rinsing tank is used, the workpieces to be rinsed can be clamped on the fixtures firstly, and then the fixtures are mounted on a rotating shaft, therefore, the spray rinsing tank is more convenient in use.

Description

technical field [0001] The invention relates to a spray cleaning tank. Background technique [0002] In the production process of wafers, lead frames and other integrated circuit components, processes such as electroplating and etching are required. During the production process, cleaning is necessary. Cleaning begins with ensuring that every part of the wafer, lead frame or other component is thoroughly cleaned. Secondly, it also needs to meet the needs of large-scale production, and can be cleaned quickly, efficiently and automatically. But the cleaning equipment in the prior art can't meet the requirement of comprehensive cleaning. And the cleaning process is slow and inefficient. Contents of the invention [0003] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a spray cleaning tank which can fully clean the workpieces to be washed. [0004] To achieve the above object, the present invention is achieved through the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B3/02H01L21/67
Inventor 王振荣刘红兵黄利松
Owner SHANGHAI SINYANG SEMICON MATERIALS