Fluid bed reactor

Abstract

Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer wall, an insulation layer inwardly of the outer wall, at least one heater positioned inwardly of the insulation layer, a removable concentric liner inwardly of the heater, a central inlet nozzle, a plurality of fluidization nozzles, at least one cooling gas nozzle, and at least one product outlet. The system may include a removable concentric sleeve inwardly of the liner. In particular systems the central inlet nozzle is configured to produce a primary gas vertical plume centrally in the reactor chamber to minimize silicon deposition on reactor surfaces.

Description

[0001] Cross References to Related Applications [0002] This application claims the benefit of US Provisional Application 61 / 262,401, filed November 18, 2009, which is hereby incorporated by reference. technical field [0003] The present disclosure relates to the pyrolysis of a silicon-containing gas in a fluidized bed to produce silicon-coated particles. Background technique [0004] Pyrolysis of silicon-containing gases in a fluidized bed is an attractive process for the production of polysilicon for the photovoltaic and semiconductor industries due to excellent mass and heat transfer, increased deposition surface, and continuous production. Fluidized bed reactors provide much higher throughputs at a fraction of the energy consumption compared to Siemens type reactors. Fluidized bed reactors can be continuous and highly automated, significantly reducing labor costs. [0005] A common problem in fluidized bed reactors is fouling around the nozzles and reactor walls bec...

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Problems solved by technology

Another common problem is contamination of the fluidized bed at high operating temperatures due to the materials used to construct the reactor

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