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Electronic component package sealing member, electronic component package, and method for fabricating electronic component package sealing member

A technology for sealing parts and electronic devices, which is applied in the direction of semiconductor/solid-state device parts, electric solid-state devices, electrical components, etc., and can solve the problem that the through hole cannot be completely sealed, it is difficult to fill the through hole, and the inner space of the package is airtight Sexual decline and other issues

Inactive Publication Date: 2015-06-03
DAISHINKU CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, conductive pastes such as the silver paste disclosed in Patent Document 1 generally have high viscosity, so it is difficult to fill tiny via holes
In addition, when a metal member is used as a conductive member to fill a minute through hole, it is difficult to manufacture a minute metal member that can be closely bonded to the minute through hole.
[0008] For this reason, when filling tiny via holes with conductive paste or metal components, poor filling may occur
Due to such poor filling, the through hole cannot be completely sealed, and as a result, the airtightness of the internal space of the package is lowered.

Method used

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  • Electronic component package sealing member, electronic component package, and method for fabricating electronic component package sealing member
  • Electronic component package sealing member, electronic component package, and method for fabricating electronic component package sealing member
  • Electronic component package sealing member, electronic component package, and method for fabricating electronic component package sealing member

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Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0161] figure 1 It is a schematic sectional view showing the internal space of the crystal unit according to the first embodiment. in addition, Figure 2A ~ Figure 2C It is a schematic diagram which shows the schematic structure of the base concerning Embodiment 1. in, Figure 2A is a schematic top view; Figure 2B is along Figure 2A A schematic cross-sectional view of the cross-sectional state after the dotted line in cuts off the base; Figure 2C It is a schematic bottom view.

[0162] in addition, Figure 3A and Figure 3B It is a schematic diagram which shows the schematic structure of the cap concerning Embodiment 1. in, Figure 3A is a schematic sectional view; Figure 3B It is a schematic bottom view. in addition, Figure 4 It is a schematic bottom view of the crystal vibrating piece according to Embodiment 1.

[0163] Such as figure 1 As shown, in the crystal resonator 1 related to the first embodiment, a crystal vibrating piece 2 (the electronic device ...

Embodiment approach 2

[0215] The configuration of the crystal unit 1 according to the second embodiment is basically the same as that of the crystal unit 1 according to the first embodiment. Therefore, only points different from the crystal unit 1 according to the first embodiment will be described below.

[0216] The configuration of the base 4 of the crystal unit 1 according to the second embodiment is different from the configuration of the base 4 of the crystal unit 1 according to the first embodiment.

[0217] Figure 24A ~ Figure 24C It is a schematic diagram showing the schematic structure of the base 4 according to the second embodiment, Figure 24A is a schematic top view, Figure 24B is along Figure 24A A schematic cross-sectional view of the state of the cut surface after the dotted line cuts the base 4, Figure 24C It is a schematic bottom view.

[0218] In the base 4 of the crystal resonator 1 according to Embodiment 2, on the rear surface (the other main surface 43 ) of the case...

Embodiment approach 3

[0226] The crystal unit 1 according to the third embodiment has basically the same structure as that of the crystal unit 1 according to the first embodiment, and therefore can produce the same effects as those of the crystal unit 1 according to the first embodiment. Hereinafter, only the parts different from the crystal unit 1 according to the first embodiment will be described.

[0227] The configuration of the base 4 of the crystal unit 1 according to the third embodiment is different from the configuration of the base 4 of the crystal unit 1 according to the first embodiment.

[0228] Figure 25A ~ Figure 25C It is a schematic diagram showing the schematic structure of the base 4 according to the third embodiment, Figure 25A is a schematic top view, Figure 25B is along Figure 25A A schematic cross-sectional view of the state of the cut surface after the dotted line cuts the base 4, Figure 25C It is a schematic bottom view.

[0229] In the base 4 of the crystal reso...

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Abstract

An electronic component package sealing member that can be used as a first sealing member in an electronic component package in which an electrode of an electronic component element is hermetically sealed with the first sealing member and a second sealing member arranged so as to oppose each other, includes: a through hole that passes through a substrate of the electronic component package sealing member; an internal electrode that is formed on a face of the substrate opposing the second sealing member; an external electrode that is formed on a face of the substrate opposite the opposing face; and a through electrode that is formed on an inner side face of the through hole electrically connecting the internal electrode and the external electrode. In the electronic component package sealing member, at least one open face of the through hole is sealed with a resin material.

Description

technical field [0001] The present invention relates to a sealing member for an electronic device package, an electronic device package using the sealing member for an electronic device package, and a method for manufacturing the sealing member for an electronic device package. The sealing member is used as the first sealing member of an electronic device package in which the electrodes of the electronic device element are sealed by the first sealing member and the second sealing member arranged to face each other. Background technique [0002] The internal space of the electronic device package is hermetically sealed to prevent deterioration of the characteristics of the electrodes of the electronic device components mounted in the internal space. As an electronic device package in which such an internal space is hermetically sealed, there is, for example, a piezoelectric vibration device such as a crystal resonator. [0003] As such an electronic device package, there is ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/02H01L23/02H03H3/02H10N30/01
CPCH01L23/3107H03H9/0514H03H9/0547H03H9/1021H01L2924/0002H01L2924/00Y10T29/42
Inventor 幸田直树
Owner DAISHINKU CORP