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Direct contact diaphragm valve and high pressure gas filler container

A contact type, diaphragm valve technology, applied in the direction of the diaphragm valve, the parts in contact between the valve element and the valve seat, the diaphragm, etc.

Active Publication Date: 2014-03-19
CENT GLASS CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In this way, when the valve is used to supply highly corrosive gases containing halogens such as fluorine gas, the corrosive gas is likely to cause surface corrosion inside the valve, so there are The resulting corrosion adheres to the surface of the valve seat, making it difficult to maintain sufficient airtightness

Method used

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  • Direct contact diaphragm valve and high pressure gas filler container
  • Direct contact diaphragm valve and high pressure gas filler container
  • Direct contact diaphragm valve and high pressure gas filler container

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0051] Connect the diaphragm valve to a 47L manganese steel container, and put 20% F at a pressure of 10.0MPaG 2 / N 2 The gas is filled in the container, and the above-mentioned diaphragm valve includes: a casing (valve body) made of SUS304, and the surface area Sb of the valve seat of the casing is 0.05 cm by rolling processing. 2 , The surface roughness Ra value is 0.8μm, the curvature radius R is 200mm; the diaphragm made of nickel-chromium-iron heat-resistant and corrosion-resistant alloy (longitudinal elastic coefficient is 207GPa), the surface area Sa of the gas contact surface is 2.25cm 2 . After filling, connect the diaphragm valve to a gas device capable of vacuum replacement, seal the gas into the diaphragm valve by opening and closing the valve, then close the valve, and repeat the vacuum replacement operation 3,000 times. After the test, the container was replaced with 5.0MPaG helium, and the leakage was measured with a leak detector, which was 1×10 -8 Pam 3 / s...

Embodiment 2

[0053] Connect the diaphragm valve to a 47L manganese steel container, and press 20% F at a pressure of 14.7MPaG 2 / N 2 Gas is filled in the container, and the above-mentioned diaphragm valve includes: a shell made of SUS304, and the surface area Sb of the valve seat part of the shell is made to be 0.02 cm by rolling processing. 2 , the surface roughness Ra value is 0.8μm, the curvature radius R is 200mm; the diaphragm made of Hastelloy corrosion-resistant and heat-resistant nickel-based alloy (longitudinal elastic coefficient is 205GPa), the surface area Sa of the gas contact surface is 2.25cm 2 . After filling, connect the diaphragm valve to a gas device capable of vacuum replacement, seal the gas into the diaphragm valve by opening and closing the valve, then close the valve, and repeat the vacuum replacement operation 3,000 times. After the test, the container was replaced with 5.0MPaG helium, and the leakage was measured with a leak detector, which was 1×10 –8 Pam 3 / ...

Embodiment 3

[0055] Connect the diaphragm valve to a 47L manganese steel container, and press 20% F at a pressure of 14.7MPaG 2 / N 2 Gas is filled in the container, and the above-mentioned diaphragm valve includes: a shell made of SUS316, and the surface area Sb of the valve seat part of the shell is 0.0065 cm by rolling processing. 2 , the surface roughness Ra value is 0.8μm, the curvature radius R is 200mm; the diaphragm made of Hastelloy corrosion-resistant and heat-resistant nickel-based alloy (longitudinal elastic coefficient is 205GPa), the surface area Sa of the gas contact surface is 2.25cm 2 . After filling, connect the diaphragm valve to a gas device capable of vacuum replacement, seal the gas into the diaphragm valve by opening and closing the valve, then close the valve, and repeat the vacuum replacement operation 3,000 times. After the test, the container was replaced with 5.0MPaG helium, and the leakage was measured with a leak detector, which was 1×10 -8 Pam 3 / s or less...

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PUM

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Abstract

A direct-touch diaphragm valve according to the present invention includes a valve body having inlet and outlet passages, a valve chamber being in communication with the inlet and outlet passages, a valve seat located around an open inner end of the inlet passage, a diaphragm arranged on the valve seat so as to hermetically seal the valve chamber and open or close the inlet and outlet passages, a stem adapted to move a center portion of the diaphragm downwardly and a driving unit adapted to move the stem in a vertical direction, wherein the valve seat and the diaphragm have respective contact surfaces formed therebetween such that: such that: the contact surface of the valve seat has a surface roughness Ra of 0.1 to 10.0 µm and a curvature radius Ra of 100 to 1000 mm; and the area ratio Sb / Sa of a contact area Sb of the valve seat with the diaphragm to a gas contact surface area Sa of the diaphragm ranges from 0.2 to 10%. The valve according to the present invention attains sufficient gas tightness and can suitably be applied to a halogen gas- or halogen compound gas-filled container.

Description

technical field [0001] The invention relates to a direct contact diaphragm valve and a high-pressure gas-filled container with the diaphragm valve. Background technique [0002] Fluorine gas is used as a gas for the etching process of substrates in semiconductor manufacturing processes such as semiconductor devices, MEMS (micro-electro-mechanical systems) devices, TFT (thin-film transistor) panels for liquid crystals, and solar cells, and for cleaning processes of thin-film forming devices such as CVD devices. play an important role. [0003] As one of the methods of supplying fluorine gas, there is a method of filling and supplying fluorine gas into a cylinder under high pressure. At that time, fluorine gas is filled in a gas cylinder to be supplied to the semiconductor manufacturing apparatus through a valve. By increasing the filling pressure of fluorine gas and reducing the turnover frequency of gas storage cylinders, the transportation cost of gas storage cylinders c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K7/12F16J3/02F16K1/30F16K27/00
CPCF16K1/302F16J3/02F16K25/00F16K7/14F16K7/126F16K7/16F17C2205/0329F17C2205/0385F17C2205/0394F17C2223/0123F17C2260/036F17C2270/0518F16K1/30F16K7/12F16K27/00
Inventor 梅崎智典田仲健二八尾章史宫崎达夫毛利勇川岛忠幸竹田胜宫崎功司上长康一佐治公一
Owner CENT GLASS CO LTD