Dual-axis accelerometer
A biaxial acceleration sensor technology, applied in multi-dimensional acceleration measurement, acceleration measurement using inertial force, etc., can solve problems such as mutual interference, high correlation, and reduced test accuracy of biaxial acceleration sensors, and achieve excellent performance and high test accuracy high effect
Active Publication Date: 2012-10-10
AAC TECH PTE LTD
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Problems solved by technology
[0004] However, the first elastic support and the second elastic support of the biaxial acceleration sensor of the related art have a large correlation in the X and Y biaxial directions. When only the X (Y) direction has acceleration, the first (two) ) elastic support member is deformed, but at the same time the second (1) elastic support member will also have a slight deformation, forming mutual interference, so that the test accuracy of the biaxial acceleration sensor of the related technology is reduced
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[0017] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0018] Such as Figure 1-4 As shown, a biaxial acceleration sensor 1 includes a base 2 and a detection sensing unit 3 fixed on the base 2 . The detection and sensing unit 3 includes a mass block 31 , comb-shaped first moving electrodes 32 respectively extending from opposite sides of the mass block 31 , and second moving electrode parts 33 respectively extending from other opposite sides of the mass block 31 , The second moving electrode portion 33 includes an electrode wall 331 and a comb-shaped second moving electrode 332 extending from the electrode wall 331 in a direction away from the proof mass 31 . The proof mass 31 includes a main body 311, two first beam-type elastic arms 312a, 312b respectively embedded in the main body 311 and perpendicular to the first moving electrode 32, and respectively arranged on the main body 311 and the two second mo...
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The invention provides a dual-axis accelerometer. The accelerometer comprises a base and a detection sensing unit fixed on the base. The detection sensing unit comprises a mass block, a first moving electrode which is in a comb tooth shape and is extended from the mass block and a second moving electrode portion. The second moving electrode portion comprises an electrode wall and a second moving electrode which is in the comb tooth shape and is extended from the electrode wall. The mass block comprises a main body portion, a first beam-type elastic arm and a frame wall. The frame wall is fixedly connected with the main body portion through the first beam-type elastic arm. The mass block also comprises a second beam-type elastic arm. The detection sensing unit is also provided with a first fixed electrode and a second fixed electrode. The first fixed electrode is interlacedly arranged with the first moving electrode and does not contact with the first moving electrode. The second fixed electrode is interlacedly arranged with the second moving electrode and does not contact with the second moving electrode. Compared to a related technology, by using the dual-axis accelerometer of the invention, measurement precision is high and sensitivity performance is better.
Description
【Technical field】 [0001] The invention relates to an acceleration sensor, in particular to a differential two-axis acceleration sensor. 【Background technique】 [0002] Micro-mechanical inertial instruments based on micro-electro-mechanical systems (MEMS) have broad application prospects due to their small size, low cost, and integration with interface circuits. Acceleration sensors are one of the typical representatives. With the continuous development of acceleration sensors, people gradually realize that the differential capacitive acceleration sensor has the advantages of large dynamic range and low power consumption. [0003] Currently, a differential capacitive accelerometer element constructed using MEMS consists of a structure similar to a standard accelerometer: mass, return spring, displacement transducer, some form of damping, and a housing to which all elements attach. The basic working principle of the capacitive acceleration sensor is that the inertial force ge...
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IPC IPC(8): G01P15/18
Inventor 张睿王琳琳
Owner AAC TECH PTE LTD