Method and apparatus for detecting a gas concentration with reduced pressure dependency

A correlation, gas technology, applied in the direction of color/spectral characteristic measurement, measurement device, material analysis by optical means, etc.

Active Publication Date: 2012-11-07
AXETRIS AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this requires the use of a pressure sensor and a pressure calibration routine

Method used

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  • Method and apparatus for detecting a gas concentration with reduced pressure dependency
  • Method and apparatus for detecting a gas concentration with reduced pressure dependency
  • Method and apparatus for detecting a gas concentration with reduced pressure dependency

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Embodiment Construction

[0036] figure 1 A schematic diagram of two possible configurations of the device for measuring the concentration of a gas is shown. The apparatus in the figure above comprises a tunable laser source 10 driven by a dc current source 18 and an ac current source 20, a gas 14, a detector 12, a control unit 16 comprising a lock-in amplifier 24 and a microprocessor 26 with a program . The second device shown in the lower figure shows the same elements as the upper figure, but with reflective optics 22 . The ac current source 20 includes a function generator, wherein the modulation amplitude can be adjusted by the control electronics 16 . The laser source 10 may be a tunable diode laser, a gas laser, a solid-state laser, a quantum cascade laser, an interband cascade laser, or a source based on frequency conversion of optical parameters. The detector 12 may be a Si detector, a Ge detector, an InGaAs detector, an InAs detector or a mercury cadmium telluride detector. A sample cell ...

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PUM

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Abstract

The invention relates to a method and an apparatus for detecting a gas concentration with reduced pressure dependency. This invention relates to a method that makes the measurement of a trace gas concentration invariant or at least less affected to pressure variations in the gas and atmospheric pressure changes. This method neither requires a pressure sensor nor a pressure calibration routine. Furthermore, the method can be applied to other gas species present in the background gas or to the background gas itself that cross-interfere with the target gas of interest. This allows removing any pressure dependency of cross-interference parameters of other gas species and / or the background gas. The new method for accurately measuring a gas concentration is based on optimizing the wavelength modulation amplitude of the laser to minimum pressure dependency.

Description

technical field [0001] The present invention relates to a method for reducing the dependence of tracer gas concentration measurements on pressure changes and atmospheric pressure changes of the gas, which can be applied to target tracer gases in the background gas and other gases that cross-interference with the target gas type. The invention also relates to a device for applying said method. Background technique [0002] Industry and commerce often require accurate measurements of tracer gases to ensure that concentrations of these tracer gases are within acceptable limits. Compliance with these limits can in turn be used to verify factors such as whether the delivered gases meet certain purity limits and / or whether the emissions of these gases comply with environmental regulations. Typical applications such as process control, emissions and environmental monitoring, security, and air conditioning require accurate concentration measurement. Wavelength Modulation Spectros...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/39
CPCG01N21/39G01N2021/399
Inventor A.威特曼S.曼策内德R.普罗塔西奥M.施图德T.黑斯勒
Owner AXETRIS AG
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