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Method for manufacturing flexible display and substrate for manufacturing flexible display

A technology for flexible displays and manufacturing methods, applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve the problem of unclean peeling of amorphous silicon thin film germanium oxide film, damage to flexible substrates, unfavorable flexible displays, etc. problem, to achieve the effect of accelerating the isotropic chemical reaction, accelerating the speed of peeling, and avoiding the impact of performance

Active Publication Date: 2012-11-07
HISENSE VISUAL TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although these two peeling methods have improved the peeling effect of flexible substrates and rigid substrates to a certain extent through continuous improvement of process conditions, the problems of unclean peeling of amorphous silicon films and germanium oxide films and damage to flexible substrates still remain. Exist, and the process conditions of stripping are also difficult to control, which is not conducive to the production of high-quality flexible displays

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  • Method for manufacturing flexible display and substrate for manufacturing flexible display
  • Method for manufacturing flexible display and substrate for manufacturing flexible display
  • Method for manufacturing flexible display and substrate for manufacturing flexible display

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Embodiment Construction

[0024] Figure 1A to Figure 1G It is a schematic flow chart of the manufacturing method of the flexible display according to the first embodiment of the present invention. First, see Figure 1A to Figure 1E , which is the manufacturing process of the substrate 100 for the flexible display. In this embodiment, the FOLED display is taken as an example, and the substrate 100 for making the flexible display is shown as a FOLED panel unit. That is to say, the substrate 100 for making the flexible display can finally form an independent flexible display such as a FOLED display.

[0025] see Figure 1A , providing a rigid substrate 110 . In this embodiment, the rigid substrate 110 is, for example, a quartz substrate or a glass substrate, but is not limited thereto. The rigid substrate 110 is mainly used to provide support during the subsequent manufacturing process of circuits and display elements, so as to prevent the flexible substrate from being broken, wrinkled and deformed. ...

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Abstract

The invention discloses a method for manufacturing a flexible display. The method comprises the following steps of: forming a silicon sacrificial layer on a rigid substrate, and attaching a flexible substrate to the silicon sacrificial layer through an adhesive layer; manufacturing a display element layer on the flexible substrate; and etching the silicon sacrificial layer under normal temperature conditions by utilizing fluorine-containing corrosive gas so as to gasify the silicon sacrificial layer, so that the flexible substrate is separated from the rigid substrate. The method for manufacturing the flexible display is simple in process, the problems of unclean stripping and stripping damage can be effectively solved, and manufacture of a high-quality flexible display is facilitated. The invention also relates to a substrate for manufacturing the flexible display.

Description

Technical field [0001] The invention relates to a flexible display, and in particular to a method for manufacturing a flexible display and a substrate for manufacturing a flexible display. Background technique [0002] At present, there are many types of display technologies for flexible displays, such as traditional liquid crystal display technology, bistable liquid crystal display technology, organic light-emitting diode (organic light-emitting diode, OLED) display technology, electrophoretic display technology, electrochromism (electrochromism) , EC) display technology and electroluminescence (electroluminescent, EL) display technology. Among them, flexible organic light-emitting diode (FOLED) displays have more advantages than other flexible displays, such as self-luminous display, fast response speed, high brightness, wide viewing angle, and low cost. Moreover, FOLED displays are based on flexible organic materials, which can be rolled, folded, and even used as a p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56H01L21/77H01L51/52
CPCH01L51/003H01L2251/5338H01L27/3244H01L33/48H01L51/0097H01L33/16Y02E10/549Y02P70/50H10K71/80H10K59/12H10K77/111H10K71/851H10K2102/311
Inventor 路林曹建伟刘卫东
Owner HISENSE VISUAL TECH CO LTD
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