The invention discloses a preparation method for a groove
semiconductor discrete device. The preparation method for the groove
semiconductor discrete device includes the following steps: firstly, eroding an epitaxial layer by utilization of a groove
mask to form a plurality of grid
electrode grooves; then depositing interlayer medium on the surface of the epitaxial layer, eroding the interlayer medium by utilization of a
contact hole mask, open holes are formed in the interlayer medium, injecting p-type and n-type
dopant to respectively form a p-type base area and a n-type
source area, eroding the surface of the epitaxial layer to form contact grooves, and filling the contact grooves through
metal inserting plugs; and finally, depositing a
metal layer on the upper surface of the device, and performing
metal erosion by utilization of a metal
mask to form a metal padding layer and connecting lines. By adoption of the preparation method, the preparation processes of a base area mask and a
source area mask are omitted, and manufacturing cost of the device is enabled to be reduced greatly; and meanwhile, original
electric properties and reliability of the device can not be affected, and therefore the performance / cost ratio of the device is increased.