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44results about How to "Does not affect electrical characteristics" patented technology

GaN-based enhancement/depletion mode heterojunction field effect transistor with buried gate structure

ActiveCN104167445AAdjustable Threshold VoltageAchieve normal workSemiconductor devicesGate dielectricOhmic contact
The invention discloses a GaN-based enhancement/depletion mode heterojunction field effect transistor with a buried gate structure. The GaN-based enhancement/depletion mode heterojunction field effect transistor is mainly composed of a substrate, an AlInGaN buffer layer, a buried gate, a buried gate dielectric layer, a GaN channel layer, an AlInGaN barrier layer, a gate dielectric layer, a source electrode, a drain electrode and a gate electrode from bottom to top, wherein the source electrode and the drain electrode are arranged on the AlInGaN barrier layer, and the gate electrode is arranged on the gate dielectric layer. The source electrode and the drain electrode are in ohmic contact with the AlInGaN barrier layer, and the source electrode and the gate dielectric layer are in Schottky contact. The buried gate dielectric layer and the buried gate are both placed in the AlInGaN buffer layer, and the buried gate is placed in the buried dielectric layer. Through independent bias arrangement of the buried gate, according to the different bias arrangement of the buried gate, the threshold voltage of devices is adjusted; when the buried gate is in a negative bias state, two-dimensional electron gas in the AlInGaN barrier layer is exhausted by the buried gate, and the devices are made to achieve enhancement mode work; when the buried gate is in a zero bias state or a positive bias state, the two-dimensional electron gas exists in the AlInGaN barrier layer, and the devices are made to achieve depletion mode work.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Discharge detection system and method based on poly-p-xylylene film and charged particles

The invention discloses a discharge detection system and method based on a poly-p-xylylene film and charged particles. Based on a film deposition technology, a poly-p-xylylene film is deposited in a complex, closed and micro electrical and electronic system and on the surface of an electrical and electronic system in an embedded manner; the micron-sized poly-p-xylylene film is conformal with an electrical and electronic system, so that large-area, all-around and dead-angle-free coverage in the electrical and electronic system is realized; based on a poly-p-xylylene film polarity technology andin combination with the electrostatic interaction of charged particles, discharge detection of the whole electrical and electronic system, precise discharge positioning of the electrical and electronic system in the system and calculation of discharge key parameters are realized; according to the invention, the universality of the discharge detection technology is improved, and the problem that the existing discharge detection technology cannot realize the detection and accurate positioning of the internal discharge of a complex, closed and micro system is solved; the effectiveness and the precision of the discharge detection technology are improved; and the robustness of the discharge detection technology for resisting the interference of the internal environment of the system is improved.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY

Preparation method of trench semiconductor power discrete device

The invention discloses a preparation method of a trench semiconductor power discrete device. The preparation method of the trench semiconductor power discrete device includes a first step of injecting P-type dopant into an epitaxial layer arranged on a substrate to form P-type base regions through a trench mask and conducting corrosion on the epitaxial layer to form a plurality of grid trenches; a second step of depositing interlayer mediums on the epitaxial layer, conducting the corrosion on the interlayer mediums through a contact hole mask, forming trenches in the interlayer mediums, injecting N-type dopant to form N-type source regions, conducting the corrosion on the surface of the epitaxial layer to form contact trenches, and conducting metal plugging filling on the contact trenches; and a third step of depositing a metal layer on the surface of the discrete device, conducting metal corrosion through a metal mask and forming a metal substrate layer and a connecting wire. The preparation method of the trench semiconductor power discrete device eliminates preparation procedures of a base region mask and a source region mask, and therefore the manufacturing cost of the discrete device is greatly reduced. In addition, original electrical characteristics of the discrete device cannot be influenced.
Owner:立新半导体有限公司

Preparation method for groove semiconductor discrete device

The invention discloses a preparation method for a groove semiconductor discrete device. The preparation method for the groove semiconductor discrete device includes the following steps: firstly, eroding an epitaxial layer by utilization of a groove mask to form a plurality of grid electrode grooves; then depositing interlayer medium on the surface of the epitaxial layer, eroding the interlayer medium by utilization of a contact hole mask, open holes are formed in the interlayer medium, injecting p-type and n-type dopant to respectively form a p-type base area and a n-type source area, eroding the surface of the epitaxial layer to form contact grooves, and filling the contact grooves through metal inserting plugs; and finally, depositing a metal layer on the upper surface of the device, and performing metal erosion by utilization of a metal mask to form a metal padding layer and connecting lines. By adoption of the preparation method, the preparation processes of a base area mask and a source area mask are omitted, and manufacturing cost of the device is enabled to be reduced greatly; and meanwhile, original electric properties and reliability of the device can not be affected, and therefore the performance/cost ratio of the device is increased.
Owner:立新半导体有限公司

Manufacturing method for two-sided copper flexible circuit board

The invention provides a manufacturing method for a two-sided copper flexible circuit board. The manufacturing method at least comprises the following steps: step 1, providing a polyimide base membrane, on the first surface of which, copper foil is formed, and forming a peelable mask pattern on the second surface of the base membrane, wherein the area, which is not covered by the peelable mask pattern, on the second surface of the base membrane constitutes a copper circuit figure; step 2, sputtering copper on the second surface of the base membrane, so as to form a copper membrane on the peelable mask pattern and the copper circuit on the copper circuit figure; step 3, tearing off the copper membrane on the peelable mask pattern and manufacturing to obtain the two-sided copper flexible circuit board. The manufacturing method has the advantages as follows: the ultrathin two-sided copper flexible circuit board can be manufactured, the process is simple, the 20-30% of production cost can be reduced, the manufacturing of the copper circuit is based on an addition process, waste emission is reduced, and environmental pollution is reduced; meanwhile, the torn copper membrane can be recycled after being cleaned simply, and material waste can be reduced.
Owner:上海蓝沛信泰光电科技有限公司

A method for preparing trench semiconductor discrete devices

The invention discloses a method of preparing a groove discrete semiconductor device. The method comprises the following steps: first, injecting P type dopant into an epitaxial layer of a substrate to form a P type area I by using a groove mask, and carrying out etching on the external layer to form a plurality of grid electrode grooves; then depositing interlamination media on the surface of the external layer, carrying out etching on the interlamination media by using a contact hole mask to form openings in the interlamination media, and injecting the P type dopant and N type dopant to the openings to form a P type area II and an N type source region respectively, wherein the P type area I and the P type area II are combined into a P type base region; then carrying out etching on the surface of the external layer to form contact hole grooves, and carrying out metal plugging filling on the contact hole grooves; and finally, depositing a metal layer on the surface of a device, carrying out metal etching by using metal mask to form a metal cushion layer and connection wires. By adopting the method of preparing the groove discrete semiconductor device, preparation procedures of base region masking and source region masking are eliminated, and the preparation cost of the device is made to be greatly reduced.
Owner:立新半导体有限公司

A kind of preparation method of trench semiconductor power device

The invention discloses a preparation method of a trench semiconductor power device. The preparation method of the trench semiconductor power device includes a first step of injecting dopant into an epitaxial layer arranged on a substrate for two times to form P-type base regions and N-type base regions, and conducting corrosion on the epitaxial layer to form a plurality of grid trenches; a second step of depositing interlayer mediums on the epitaxial layer, conducting the corrosion on the interlayer mediums through a contact hole mask, conducting the corrosion on the interlayer mediums and the surface of the epitaxial layer through a contact hole mask to form contact trenches, and conducting metal plugging filling on the contact trenches; and a third step of depositing a metal layer on the surface of the discrete device, conducting metal corrosion through a metal mask and forming a metal substrate layer and a connecting wire. The preparation method of the trench semiconductor power device eliminates preparation procedures of a base region mask and a source region mask, and therefore the manufacturing cost of the power device is greatly reduced. In addition, original electrical characteristics of the power device cannot be influenced. The cost-performance ratio of the power device is improved. The performance, the quality and the reliability of the trench semiconductor power device are not influenced.
Owner:立新半导体有限公司

A kind of preparation method of trench semiconductor power discrete device

The invention discloses a preparation method of a trench semiconductor power discrete device. The preparation method of the trench semiconductor power discrete device includes a first step of injecting P-type dopant into an epitaxial layer arranged on a substrate to form P-type base regions through a trench mask and conducting corrosion on the epitaxial layer to form a plurality of grid trenches; a second step of depositing interlayer mediums on the epitaxial layer, conducting the corrosion on the interlayer mediums through a contact hole mask, forming trenches in the interlayer mediums, injecting N-type dopant to form N-type source regions, conducting the corrosion on the surface of the epitaxial layer to form contact trenches, and conducting metal plugging filling on the contact trenches; and a third step of depositing a metal layer on the surface of the discrete device, conducting metal corrosion through a metal mask and forming a metal substrate layer and a connecting wire. The preparation method of the trench semiconductor power discrete device eliminates preparation procedures of a base region mask and a source region mask, and therefore the manufacturing cost of the discrete device is greatly reduced. In addition, original electrical characteristics of the discrete device cannot be influenced.
Owner:立新半导体有限公司
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