Graphene carbon nano tube composite film and preparation method and application thereof

Abstract

The invention provides a graphene carbon nano tube composite film and a preparation method and application thereof. The preparation method comprises the following steps that S1, a substrate is provided, and the whole or at least one face of the substrate is made of a graphene catalyst; S2, electroplating is conducted, thus, a carbon nano tube is attached to the surface of the substrate, and the graphene catalyst is not fully covered with the carbon nano tube; and S3, graphene continues to grow on the face, containing the graphene catalyst, of the substrate through a chemical gas phase method,and the graphene carbon nano tube composite film is obtained. The graphene carbon nano tube composite film and the preparation method and application thereof have the characteristic of being simple intechnology, the graphene carbon nano tube composite film obtained through the non-transferring self growing technology is good in quality, and contact and attaching between the composite film and thecatalyzing substrate are good.

Description

technical field [0001] The invention belongs to the field of electronics, and relates to a graphene carbon nanotube composite film and a preparation method and application thereof. Background technique [0002] With the increase of main switching frequency, conversion power supply voltage and power in electronic circuits, higher requirements are put forward for the rectifier switching diodes that play a controlling role. Hybrid Schottky diodes (MPS) have the characteristics of high blocking voltage, low leakage current, faster switching speed, larger conduction current, and smaller conduction voltage. For MPS with vertical structure, the copper base in the device package structure not only supports the chip, but also is one of the working electrodes of the chip. With the rapid development of the third-generation semiconductor technology, the power density of MPS is increasing, generating more and more heat, and the chip junction temperature rises rapidly. When the temperatu...

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Problems solved by technology

[0009] In view of the shortcomings of the prior art described above, the object of the present invention is to provide a graphene carbon nanotube composite film and its preparation method and application, for solving the problem of poor heat dissipation effect of power devices in the prior art

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