Device and method for detecting large-aperture window

Abstract

The invention discloses a device and a method for detecting a large-aperture window. On the basis of a compensator and a sub-aperture splicing principle, the device comprises a phase shifting interferometer, the compensator, a detected window, a standard spherical mirror, an adjusting mechanism and a computer system, wherein the computer system is connected with the phase shifting interferometer; the compensator compensates introduced aberration during placement of the detected window into an auto-collimation light path which consists of the phase shifting interferometer and the standard spherical mirror; the detected window is adjusted by the adjusting mechanism, so the phase shifting interferometer obtains the sub-area transmission wave front information of overlapped areas on the detected window; the obtained sub-area transmission wave front information is spliced by data processing software which is installed on the computer system; and the full-aperture transmission wave front information of the detected window is obtained. The invention provides the detection device and the detection method for high-accuracy large-aperture window processing measurement, and has a great application value.

Description

technical field [0001] The invention belongs to the field of advanced optical manufacturing and detection, and relates to a large-diameter window detection device and a detection method, in particular to a large-diameter window detection method. Background technique [0002] The window plays an irreplaceable role in the current optical system. With the continuous development of science and technology and optical manufacturing technology, the window diameter is constantly increasing, and the window precision requirements are getting higher and higher. The detection accuracy restricts the processing accuracy, and only the high-precision detection method can have the high-precision processing and the high-precision window. However, there are still many challenges for high-precision quantitative detection of large-aperture windows with an aperture of 1 meter and above. [0003] In the window processing stage, the first surface of the window is usually processed first, and when ...

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art, and propose a method based on compensator and sub-aperture splicing to detect the large-aperture window detection device and detection method, and use sub-aperture splicing to obtain the full-aperture transmission wavefront of the large-aperture window , which can effectively solve the problems such as the difficulty in manufacturing large-aperture planar interferometers in other detection methods, and can also solve the error of spherical aberration introduced in the self-collimation system composed of interferometers and standard spheres

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