An absolute calibration device and method for a large-aperture reference plane mirror of a phase-shifting interferometer
A technology of reference plane and phase-shifting interference, which is applied in the field of absolute calibration device for large-aperture reference plane mirror of phase-shifting interferometer, to achieve the effect of reducing detection cost, improving detection efficiency and simple equipment
Active Publication Date: 2021-09-07
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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[0005] In order to solve the problem of interferometer reference plane calibration when detecting the surface shape of non-rotating optical elements such as square mirrors, the present invention proposes an absolute calibration device and method for large-aperture reference plane mirrors of phase-shifting interferometers
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[0048] In order to further illustrate the features of the present invention, the following will be described in detail in conjunction with specific implementation examples and accompanying drawings.
[0049] figure 1 Shown is the absolute calibration device of the large-diameter reference plane mirror of the phase-shifting interferometer in the present invention, including: including a large-diameter phase-shifting interferometer 1, a reference plane mirror 101, an axial displacement table 2, an inclination adjustment table 201, a lifting device 202, an electric rotating Platform 3, plane flat crystal 4, computer system 5 and vibration isolation base 6; wherein the large-diameter phase-shift interferometer 1 and the axial displacement platform 2 are installed on the vibration isolation base 6, and their axes are perpendicular to each other; the axial displacement platform 2 includes a tilt adjustment table 201 and a lifting device 202, which are used to meet the adjustment fun...
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The invention provides an absolute calibration device and method for a large-diameter reference plane mirror of a phase-shift interferometer, which is used for measuring reference errors in a specific area of a large-diameter reference plane of a phase-shift interferometer, including: a large-diameter phase-shift interferometer, a reference plane mirror, an axial Translation stage, tilt adjustment stage, lifting device, motorized rotation stage, flat crystal, computer system and vibration isolation base. The large-aperture phase-shifting interferometer and the measuring platform with lifting and axial translation functions are installed on the vibration isolation base, and the computer system is connected with the large-aperture phase-shifting interferometer to collect n times of equal rotation angles and plane flat crystal interference after translation The surface shape error information of the sub-aperture area corresponding to the reference plane is separated from the pattern; the sub-aperture surface information of the next reference plane is obtained by adjusting the translation stage, and finally the surface shape error of the specific area of the reference plane is obtained by splicing data processing software. The invention provides an effective and low-cost detection means for the absolute calibration of the large-diameter reference plane mirror of the phase-shifting interferometer.
Description
technical field [0001] The invention belongs to the technical field of advanced optical manufacturing and detection, and in particular relates to an absolute calibration device and method for a large-aperture reference plane mirror of a phase shift interferometer. Background technique [0002] With the continuous development of modern optics, large scientific devices with high-precision optical components represented by advanced light sources have more and more extensive development. Among them, the surface shape of optical elements is no longer limited to the traditional circle, and non-rotationally symmetrical optical elements such as square mirrors play an increasingly important role in the optical system, and the requirements for surface shape accuracy are also becoming more stringent. [0003] As an effective high-precision optical surface shape detection technology, optical interference detection technology is widely used in the field of surface shape detection of non-...
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IPC IPC(8): G01B9/02G01B11/24
CPCG01B11/2441G01B9/02072
Inventor 侯溪张帅全海洋胡小川雷茸粮
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI