Heterojunction pure resistance-diode composite thermometer
A heterojunction and thermometer technology, applied in thermometers, thermometers using electric/magnetic elements that are directly sensitive to heat, using electrical devices, etc., can solve problems such as electrical resistance change, achieve fast response time, and high measurement accuracy , the effect of simple operation
Inactive Publication Date: 2014-05-07
SHANDONG UNIV
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Problems solved by technology
[0004] The study found that the metal / insulator / metal (MIM) structure will lead to obvious electroresistive switching phenomenon due to redox reaction
However, this theoretical research has not yet been reported on the product development of thermometers.
Method used
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Embodiment 1
[0044] Preparation of Co(10nm) / CoO-ZnO(10nm) / Ag(60nm) heterojunction:
[0045] Using the method of magnetron sputtering, grow the upper and lower electrodes and the middle ZnO insulating layer on the substrate, and use the stainless steel mask method to prepare; the process conditions and steps are as follows:
[0046] Vacuum the sputtering chamber to 7.5×10 -5 Pa, ZnO ceramics with a purity of more than 99.95% and Co metal and Ag metal with a purity of more than 99.99% are used as targets, ZnO is placed on the radio frequency target, and Co and Ag are placed on the DC target respectively. The high-purity Ar gas with a purity of more than 99.99% is used as the sputtering atmosphere, and the Ar gas enters the sputtering chamber through a gas flow meter.
[0047] The sputtering power of Co is 5W, and the sputtering pressure is 0.58Pa.
[0048] The sputtering power of ZnO was 15W, and the sputtering pressure was 0.65Pa.
[0049] The sputtering power of Ag is 5W, and the sputte...
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Abstract
The invention relates to a heterojunction pure resistance-diode composite thermometer which is provided with a Co / CoO-ZnO / Ag heterojunction. In the heterojunction, Co is a bottom electrode, Ag is a top electrode, and CoO-ZnO is a composite insulating layer. When in measurement, the Ag top electrode and the Co bottom electrode of the heterojunction are connected with an external circuit measuring meter. When silver has positive voltage and cobalt has negative voltage, the heterojunction is low in resistance, and high temperature is measured by an R-T curve corresponding to conductivity of metal in low resistance. When the silver has negative voltage and the cobalt has positive voltage, the heterojunction is high in resistance, low temperature is measured by an R-T curve corresponding to conductivity of a semiconductor in high resistance, and the temperature measuring range is 5K-300K. The thermometer is wide in temperature measuring range, can ensure the same measuring precision within a large range, is short in temperature response time and quite sensitive, and can be used for measuring the temperature of a micron-sized object.
Description
technical field [0001] The invention relates to a heterojunction pure resistance-diode composite thermometer, which belongs to the field of semiconductor materials and devices. Background technique [0002] The measurable temperature range of existing thermometers is usually relatively narrow. When a wide range of temperature is to be measured, several thermometers must be prepared for temperature measurement in different ranges. Therefore, preparing a thermometer that can accurately measure high and low temperatures at the same time will bring great convenience to temperature measurement in various complicated situations. [0003] CN200510011171.5 (CN1632484A) provides a temperature sensor based on a disordered multi-walled carbon nanotube-heterojunction, including an insulating and heat-insulating tube, a multi-walled carbon nanotube powder column filled in the insulating and heat-insulating tube, and arranged on a multi-walled carbon One end of the nanotube powder column...
Claims
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IPC IPC(8): G01K7/16
Inventor 颜世申李强沈婷婷曹艳玲张昆代正坤刘国磊陈延学梅良模
Owner SHANDONG UNIV