A
resistance thermometer is provided having a measuring
resistor in a form of a 0.1 to 10 μm thick structured
platinum layer applied to an electrically insulated surface of a substrate and an electrically insulating
coating layer covering the
platinum layer. The substrate or its surface contains
zirconium dioxide, which is stabilized with oxides of a trivalent and a pentavalent
metal. Preferably, the trivalent
metal is
yttrium and the pentavalent
metal is
tantalum or
niobium. The characteristic curve of the measuring
resistor preferably conforms to DIN-IEC 751. For
mass production of resistance thermometers having high and reproducible measurement accuracy, a structured
platinum layer having a thickness of 0.1 to 10 μm is applied to an electrically insulating substrate having a
thermal expansion coefficient in the range of 8.5 to 10.5×10−6 / ° K and a roughness less than 1 μm, and the structured platinum layer is covered by an electrical insulator. The resistance thermometers allow precise
temperature measurement between −200° C. and +850° C., preferably as a sensor in an
exhaust gas treatment system. In a substance-sensitive sensor having a circuit path structure on a substrate, the circuit path structure has an epitaxially applied base layer, and a substance-sensitive metal layer attached to the epitaxially applied base layer.