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Washing method for mask used in vapor deposition step in production of organic EL device and cleaning agent

A cleaning solution and mask technology, applied in chemical instruments and methods, cleaning methods and utensils, cleaning methods using liquids, etc., can solve the problems of time-consuming, complicated cleaning process of the device, inability to achieve complete cleaning, etc., and achieve the drying process. Easy and simple, simplified rinsing process, effect of excellent drying performance

Inactive Publication Date: 2013-06-19
DONGWOO FINE CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is a problem in that the rinsing process following removal of the organic EL material is complicated and requires additional rinsing liquid
In addition, Korean Patent Publication No. 10-2004-0072279 discloses a device for cleaning an organic EL (electroluminescence) mask, but the problem is that the device for evaporating and liquefying the solvent is very complicated and the cleaning process is time-consuming
In addition, Korean Patent Laid-Open No. 10-2007-0065646 discloses the use of a cleaning solution including isopropanol, a polar protic solvent, but the problem is that the cleaning solution has insufficient ability to dissolve deposited materials and cannot achieve complete cleaning.

Method used

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  • Washing method for mask used in vapor deposition step in production of organic EL device and cleaning agent
  • Washing method for mask used in vapor deposition step in production of organic EL device and cleaning agent
  • Washing method for mask used in vapor deposition step in production of organic EL device and cleaning agent

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1 to 6 and comparative example 1 to 6

[0036] Examples 1 to 6 and Comparative Examples 1 to 6: Cleaning of organic EL mask

Embodiment 1

[0038] 20 liters of THF solution was added as a cleaning solution into the clean chamber of the ultrasonic processing device, and then the organic EL vapor deposition mask having the organic EL material deposited thereon was soaked in the THF solution at room temperature. The THF solution containing the organic EL vapor deposition mask soaked therein was ultrasonically treated to clean the organic EL vapor deposition mask. After the cleaning process was completed, the organic EL vapor deposition mask was rinsed once with deionized water. Specifically, after the cleaning process was completed, the organic EL vapor deposition mask was rinsed once with deionized water for 30 seconds using a spraying device.

Embodiment 2

[0040] This example was carried out in the same manner as in Example 1, except that two rinsing treatments were performed with deionized water.

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Abstract

The invention discloses a washing method for organic EL mask. The method includes the steps of (a) providing THF solution in a clean chamber, (b) immersing the organic EL mask in the THF solution, (c) cleaning the organic EL mask immersed in the THF solution with ultrasound, and (d) rinsing the cleaned organic EL mask with deionized water. The invention further discloses EL mask cleaning agent containing tetrahydrofuran and isopropanol.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to Korean Patent Application Nos. 10-2011-0135850 and 10-2011-0136361 filed on December 15, 2011 and December 16, 2011, which are hereby incorporated by reference in their entirety. technical field [0003] Exemplary embodiments of the present invention relate to cleaning methods, and more particularly, to methods for removing organic EL materials attached to masks during vapor deposition for manufacturing organic EL devices, and to cleaning methods for organic EL masks. liquid composition. Background technique [0004] As a display device, a flat panel display has attracted much attention, including a liquid crystal display device and a display device having an organic electroluminescent (EL) device. Liquid crystal display devices have lower power consumption, but require an external light unit (backlight unit) to obtain bright images, however, display devices with organic EL devices,...

Claims

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Application Information

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IPC IPC(8): B08B3/04B08B3/08B08B3/12C11D7/60C11D7/50
Inventor 李殷相金佑逸金炳默洪宪杓
Owner DONGWOO FINE CHEM CO LTD