Washing method for mask used in vapor deposition step in production of organic EL device and cleaning agent
A cleaning solution and mask technology, applied in chemical instruments and methods, cleaning methods and utensils, cleaning methods using liquids, etc., can solve the problems of time-consuming, complicated cleaning process of the device, inability to achieve complete cleaning, etc., and achieve the drying process. Easy and simple, simplified rinsing process, effect of excellent drying performance
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1 to 6 and comparative example 1 to 6
[0036] Examples 1 to 6 and Comparative Examples 1 to 6: Cleaning of organic EL mask
Embodiment 1
[0038] 20 liters of THF solution was added as a cleaning solution into the clean chamber of the ultrasonic processing device, and then the organic EL vapor deposition mask having the organic EL material deposited thereon was soaked in the THF solution at room temperature. The THF solution containing the organic EL vapor deposition mask soaked therein was ultrasonically treated to clean the organic EL vapor deposition mask. After the cleaning process was completed, the organic EL vapor deposition mask was rinsed once with deionized water. Specifically, after the cleaning process was completed, the organic EL vapor deposition mask was rinsed once with deionized water for 30 seconds using a spraying device.
Embodiment 2
[0040] This example was carried out in the same manner as in Example 1, except that two rinsing treatments were performed with deionized water.
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 