Light-emitting chip and method for manufacturing light-emitting chip
A technology of light-emitting chips and manufacturing methods, which can be applied to electrical components, circuits, semiconductor devices, etc., and can solve problems such as poor heat dissipation
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[0037] Figure 1A to Figure 1M It is a schematic cross-sectional flow chart of the method for manufacturing a light-emitting chip according to the first embodiment of the present invention. Please refer first Figure 1A In the manufacturing method of this embodiment, an epitaxial substrate 10 may be provided first, and an epitaxial stack layer 110 has already been formed on the epitaxial substrate 10. In this embodiment, the epitaxial stacked layer 110 includes a first semiconductor layer 112, a light emitting layer 114, and a second semiconductor layer 116 stacked in sequence. In this embodiment, the epitaxial stacked layer 110 is fabricated on the epitaxial substrate 10 through an epitaxial fabrication process, for example. The epitaxy process includes hydride vapor phase epitaxy (HVPE), molecular beam epitaxy (MBE), or metal-organic vapor-phase epitaxy (MOVPE) Wait. In addition, the epitaxial stack layer 110 may include one or more epitaxial semiconductor structures 110S to...
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