Substrate for display panel and substrate exposure method
An exposure method and a display panel technology, which are applied in microlithography exposure equipment, photolithography exposure devices, optics, etc., can solve the problems of high mask prices, opening position shifts, and size increases.
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Embodiment approach 1
[0055] refer to Figure 1-11 The substrate for a display panel of this embodiment and the exposure method using this substrate are demonstrated.
[0056] figure 1 is a schematic perspective view showing the state before exposing the display region in the exposure method of Embodiment 1, figure 2 It is a schematic perspective view showing a state in which the display region is being exposed in the exposure method according to the first embodiment.
[0057] The exposure method of the board|substrate of this embodiment uses what is called a so-called "scan (scan) exposure". Such as figure 1 and 2 As shown, the mother glass substrate 10 is moved while irradiating ultraviolet rays to the surface of the mother glass substrate 10 through the light transmitting portion of the mask 50 using a mask 50 formed with a slit-shaped light transmitting portion. figure 1 , 2 Arrows in indicate the moving direction of the mother glass substrate 10 . The exposure method of the present ...
Embodiment approach 2
[0094] This embodiment shows another example of the alignment mark arranged in the frame region of the substrate for a display panel. Figure 12 It is a schematic plan view showing an enlarged alignment mark formed on a substrate for a display panel according to Embodiment 2. FIG. Such as Figure 12As shown, in this embodiment, a slit-shaped notch (removed part) with a width (W) of 15 μm and a length (L) of about 500 μm is provided in the member arranged in a planar form, and the notch is used Make alignment marks. As the above-mentioned planarly arranged member, if it is arranged at a position away from the display area corresponding to the array substrate by 2 mm to 50 mm, a metal member formed in the same process as the source signal line can be used. When the display area corresponding to the color filter substrate is separated by 2 mm to 50 mm, a light shielding member formed in the same process as the black matrix can be used. The center line of the notch is formed at...
Embodiment approach 3
[0096] This embodiment shows another example of the alignment mark arranged in the frame region of the substrate for a display panel. Figure 13 It is a schematic plan view showing an enlarged alignment mark formed on a substrate for a display panel according to Embodiment 3. FIG. Such as Figure 13 As shown, in this embodiment, the alignment mark has an H shape, and the upper end and the lower end of a straight line portion with a width (W) of 15 μm and a length (L) of about 500 μm are connected at right angles to their midpoints. A straight line extending in the left and right directions. If it is installed at a position away from the display area corresponding to the array substrate by 2 mm to 50 mm, a metal member formed in the same process as the source signal line can be used. When the display area is separated by 2 mm to 50 mm, a light shielding member formed in the same process as the black matrix can be used. The center line of the alignment mark is formed at a pos...
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Abstract
Description
Claims
Application Information
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