An Experimental Device for Obtaining Large-area Uniform Discharge Plasma
A discharge plasma and experimental device technology, applied in the field of plasma, can solve the problems of lack of real-time diagnosis of discharge plasma, small discharge plasma area, low energy utilization rate, etc., and achieve easy control, high energy utilization rate, and low energy consumption. low effect
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[0024] specific implementation plan
[0025] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0026] An experimental device for obtaining large-area uniform discharge plasma is composed of a bipolar nanosecond pulse power supply 1, a reactor 9, a multi-needle-plate electrode, a gas distribution system, a spectral measurement system and a discharge measurement system.
[0027] Bipolar nanosecond pulse power supply 1 can alternately generate the same narrow pulse voltage waveform in positive and negative directions; the pulse rise time is about 20ns, the pulse width is about 60ns, the pulse peak voltage is 0-60kV, and the pulse repetition frequency is in the range of 0-400Hz Continuously adjustable.
[0028] The multi-needle-plate electrode is composed of upper electrode 2, multi-needle electrode 10, plate electrode 12, lower electrode 16 and dielectric sheet 13; upper electrode 2, multi-needle elect...
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