V-type coupled cavity semiconductor laser unit based on on-chip heating resistor wavelength tuning
A technology of wavelength tuning and heating resistors, which is applied in the direction of devices controlling laser output parameters, etc., can solve problems affecting laser line width characteristics, tuning range limitations, power instability, etc., to improve line width stability, avoid noise, and better The effect of single longitudinal modulus
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[0038] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0039] like figure 1 , 2 As shown, the present invention includes a V-type coupled cavity semiconductor laser composed of a half-wave coupler 2, a fixed gain cavity 1 and a wavelength tuning cavity 3; a section of heating thin film resistor 6 is arranged on the top of the wavelength tuning cavity 3, and the heating thin film resistor 6 is connected to V There is an electrically insulating thin layer 5 between the electric injection metal electrodes 8 of the type coupled cavity semiconductor laser;
[0040] like Image 6 , 7As shown, there is a deep etched air heat insulation groove 7 on the two outer sides of the whole formed by the heating thin film resistor 6 and the electric injection metal electrode 8 at the top of the wavelength tuning cavity 3;
[0041] like Figure 13 As shown, there is a section of heating thin film resistor 6a on the top o...
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