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Program control method and program control system

A program control method and program control technology, which is applied to program control and electrical program control in sequence/logic controllers, can solve problems such as programs affecting batches, avoid program changes, improve control efficiency, and avoid misoperations Effect

Active Publication Date: 2016-04-13
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the current program control system, engineers of different processes can modify or delete the programs in the program control system. For example, dry engraving engineers can modify the program of the CVD process. Such a control method will cause unnecessary The modified or deleted program is misoperated and affects the batch (lot) on the line

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  • Program control method and program control system
  • Program control method and program control system
  • Program control method and program control system

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Embodiment Construction

[0032] The program control method and program control system of the present invention will be described in more detail below in conjunction with schematic diagrams, wherein a preferred embodiment of the present invention is shown, and it should be understood that those skilled in the art can modify the present invention described here and still implement the present invention beneficial effect. Therefore, the following description should be understood as the broad knowledge of those skilled in the art, but not as a limitation of the present invention.

[0033] In the interest of clarity, not all features of an actual implementation are described. In the following description, well-known functions and constructions are not described in detail since they would obscure the invention with unnecessary detail. It should be appreciated that in the development of any actual embodiment, numerous implementation details must be worked out to achieve the developer's specific goals, such ...

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Abstract

The invention relates a recipe control method, and further discloses a recipe control system using the recipe control method. The recipe control method comprises the steps that a recipe change request is put forward, and comprises authority information of a recipe group, the authority information of the recipe change request is judged, the recipe change request is carried out if the authority information of the recipe change request satisfies requirements, and if the authority information of the recipe change request does not satisfy the requirements, the recipe change request does not succeed. According to the recipe control method, grouping management is conducted on a recipe, and only when the recipe change request satisfies the requirements, can a control module control an execution module to carry out the recipe change request. If the authority information of the recipe change request does not satisfy the requirements, the recipe change request does not succeed, and therefore a person who does not have authority of the recipe group is effectively prevented from changing the recipe, misoperations are avoided, and automating control efficiency of automation of semiconductor manufacturing is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor factory automation, in particular to a program control method and a program control system. Background technique [0002] Semiconductor manufacturing is a high-tech industry, but also a high-investment industry. Semiconductor manufacturing plants are increasingly automating their production control activities in order to achieve their operational goals and increase productivity. Among them, in the semiconductor manufacturing process, the recipe (recipe), also known as the process formula, is an important factor. It records how to process raw materials to produce the products desired by the semiconductor manufacturing plant. Therefore, the automation of the entire semiconductor manufacturing plant In the system, automation of recipe control is particularly important. [0003] In order to unify the control program and realize the automation of program control, it is necessary to establish a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/04
Inventor 俞晓菁娄晓祺朱燕萍
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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