Area classification device, substrate inspection device, and area classification method

Abstract

PURPOSE: A region classifying device, a substrate inspection device, and a region classifying method thereof are provided to improve inspection precision by accurately classifying an important area in the inspection of a circuit pattern. CONSTITUTION: A region extracting unit (12) extracts an attention region from a design image corresponding to a substrate based on the design data of a multilayer substrate. A net list generation unit (14) generates a first and a second net list based on the state of conductivity in the attention region. When the first net has a predetermined difference with the second net list, a region classifying unit (16) classifies the attention region as an important region. [Reference numerals] (12) Region extracting unit; (14) Net list generation unit; (16) Region classifying unit; (18) Classifying unit per each object; (26) Memory unit; (28) Operating unit; (34) Test data generating unit; (36) Camera unit; (38) Test unit; (500) Data server; (600) CAM editor; (800) Verify device; (PG1) Program

Description

technical field [0001] The present invention relates to area classification techniques for inspecting circuit patterns. Background technique [0002] Usually, when inspecting a circuit pattern of a printed circuit board or the like, the inspection is performed by comparing an image obtained by photographing the circuit pattern of the inspection object with an image obtained by photographing a high-quality part, or by comparing an image obtained by photographing the circuit pattern of the inspection object and images generated from design data for inspection. In the circuit pattern, there are parts that require strict inspection criteria such as image signal lines and isolation gaps (Clearance Hole), and parts that do not need to be strictly inspected, such as large-area solid power layer parts and text parts. . Therefore, when the same inspection standard is applied to the entire area of ​​the circuit pattern, if the inspection standard is strict, more false positives will...

AI Technical Summary

Problems solved by technology

[0007] However, in the techniques of Patent Documents 1 to 3, there is still a problem that area classification is not properly performed, resulting in misreporting and missing inspections.

In particular, when the substrate to be inspected is one of the multilayer substrates, there is a problem that the phenomenon of misreporting and missed inspections increases significantly.

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