Area classifying device, substrate detecting device and area classifying method

Abstract

The invention relates to an area classifying technology for inspecting circuit patterns and increases inspection accuracy of the circuit patterns in a multi-layer substrate. The area classifying device comprises an area extraction unit for extracting an object area of an objective layer in the multi-layer substrate based on design data of the multi-layer substrate laminated by a plurality of substrates provided with the circuit patterns respectively; a netlist generation unit for generating a first netlist and a second netlist respectively, wherein the first netlist expresses whether or not the objective area has an electrical connection relationship between the circuit patterns and connection holes of the objective layer with matching conductivity with the design, and the second netlist expresses whether or not the objective area has an electrical connection relationship between the circuit pattern netlist and the connection holes of the objective layer with unmatching conductivity with the design; and an area classification unit for classifying the objective area into an important area for inspection when a predetermined difference exists between the first netlist and the second netlist and classifying the objective area in a non-important area with a lower importance degree than the important area when the predetermined difference does not exist.

Description

technical field [0001] The present invention relates to area classification techniques for inspecting circuit patterns. Background technique [0002] Usually, when inspecting a circuit pattern of a printed circuit board or the like, the inspection is performed by comparing an image obtained by photographing the circuit pattern of the inspection object with an image obtained by photographing a high-quality part, or by comparing an image obtained by photographing the circuit pattern of the inspection object and images generated from design data for inspection. In the circuit pattern, there are parts that require strict inspection criteria, such as image signal lines and isolation gaps (Clearance Hole), and parts that do not need to be strictly inspected, such as large-area solid power layer parts and text parts. . Therefore, when the same inspection standard is applied to the entire area of ​​the circuit pattern, if the inspection standard is strict, more false positives wil...

AI Technical Summary

Problems solved by technology

[0007] However, in the techniques of Patent Documents 1 to 3, there is still a problem that area classification is not properly performed, resulting in misreporting and missing inspections.

In particular, when the substrate to be inspected is one of the multilayer substrates, there is a problem that the phenomenon of misreporting and missed inspections increases significantly.

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