Method for measuring magnetic field using magnetoelectric sensor
An electromagnetic sensor and sensor technology, which is used in the fields of magnetic field measurement, magnetic field size/direction, and magnetic performance measurement using electromagnetic devices
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[0045] The area used for this embodiment is 20×2mm 2 The ME sensor in the form of a strip structure, the ME sensor is fixedly clamped on one end of the strip. The lowermost layer of the sensor is made of a 130 μm thick silicon support on which there is a 300 nm thick molybdenum film. The overlying layer is made of 1800nm thick piezoelectric aluminum nitride. There is a 1750 nm thick magnetostrictive layer made of metallic glass (FeCoSiB) thereon. The ME voltage is tapped between the molybdenum layer and the magnetostrictive layer and measured by means of a lock-in amplifier or a spectrum analyzer. The modulation field is generated by means of an air coil surrounding the sensor and the measurement signal is generated by means of a pair of Helmholtz coils.
[0046] The magnetostrictive characteristic curve λ(H) of the example sensor is qualitatively as in figure 1 extended as shown in . It can be clearly seen that the parabolic change curve in the absence of a magnetic fi...
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