Gas analysis device and method

Abstract

The invention provides a gas analysis device with an in-situ calibration function. The gas analysis device comprises a sampling chamber, an analysis chamber, a gas analyzer and a calibration module, wherein the sampling chamber is connected with a to-be-detected chamber through a first valve and used for leading in sample gas in the to-be-detected chamber; the analysis chamber is connected with the sampling chamber through a second valve, and a vacuum gauge tube is arranged on the analysis chamber and used for monitoring the degree of vacuum of the analysis chamber; the gas analyzer is arranged in the analysis chamber and used for analyzing and testing to-be-analyzed gas; the calibration module is used for providing standard gas for the gas analyzer and quantificationally calibrating the gas analysis device. The invention further provides a gas analysis method. According to the invention, the gas analysis device is periodically calibrated through the calibration module, bakeout degassing is performed through a heater, gas sweeping and protective gas filling are performed through a sweeping and degassing module, a system is enabled to maintain favorable testing background, testing accuracy is guaranteed, gas strength testing at the level of part per billion can be realized, and the gas analysis device is especially suitable for gas analysis and detection in EUV vacuum environment.

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