Reset compensation type three-optical-axis linear displacement laser interferometer calibration method and device

Abstract

The invention provides a reset compensation type three-optical-axis linear displacement laser interferometer calibration method and a reset compensation type three-optical-axis linear displacement laser interferometer calibration device, and belongs to the laser measurement technology. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form, the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated, three light beam position detectors respectively measure the derivative displacement of the three standard measuring light beams relative to a target reflecting mirror in a plane vertical to the standard measuring light beams in any two-dimensional directions, a micro inching device measures the derivative displacement average value according to the three light beam position detectors, the real-time reset compensation is carried out on the derivative displacement of the target reflecting mirror, and the incidence position of the measuring light beams on the reflecting surface of the target reflecting mirror is enabled not to be changed.

Description

technical field

[0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique

[0002] Laser interferometry linear displacement technology is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronics equipment, nanotechnology industrial equipment and national defense equipment. In order to ensure the accuracy of laser interferometer measurement of linear displacement , requires a scientific and effective linear displacement laser interferometer calibration method and device. The general idea of ​​calibrating a linear displacement laser interferometer is to use a linear displacement laser interferometer with a higher level of precision for calibration. When the accuracy of the two is similar, it is called comparison. In the actual calibration work, most of the linear displacement laser interfe...

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