Three-optical axis compensation and air bath type linear displacement laser interferometer calibration method and device

Abstract

The invention discloses a three-optical axis compensation and air bath type linear displacement laser interferometer calibration method and a three-optical axis compensation and air bath type linear displacement laser interferometer calibration device, and belongs to the technical field of laser measurement. Measurement light beams of a calibrated laser interferometer penetrate through a middle through hole of a three-axis hollow laser interference mirror group, and are arranged in parallel at the central positions of three parallel standard measurement light beams which are distributed as side edges of a regular triangular prism; the standard measurement light beams are at short perpendicular distances away from the measurement light beams of the calibrated laser interferometer, and an average air refractivity value of the three standard measurement light beams is approximate to air refractivity values of the measurement light beams of the calibrated laser interferometer; air temperature, air humidity and air pressure in a stable air bath environment formed by an air bath device are approximately uniformly distributed, so that the average air refractivity value of the three standard measurement light beams is more approximate to the air refractivity values of the measurement light beams of the calibrated laser interferometer; a measurement error caused by the surface appearance of the reflecting surface of a target reflector is compensated into a linear displacement measurement result to ensure the accuracy of a linear displacement measurement value.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique [0002] Laser interferometry linear displacement technology is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronics equipment, nanotechnology industrial equipment and national defense equipment. In order to ensure the accuracy of laser interferometer measurement of linear displacement , requires a scientific and effective linear displacement laser interferometer calibration method and device. The general idea of ​​calibrating a linear displacement laser interferometer is to use a linear displacement laser interferometer with a higher level of precision for calibration. When the accuracy of the two is similar, it is called comparison. In the actual calibration work, most of the linear displacement laser interfe...

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