A cleaning device and automatic cleaning system
An automatic cleaning and cleaning device technology, applied in the direction of electrostatic cleaning, cleaning flexible objects, cleaning methods and utensils, etc., can solve the problems of mask plate contamination, increased cost, unsatisfactory cleaning effect, etc., and achieves elimination of electrostatic adsorption. Effect
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[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0022] Embodiments of the present invention provide a cleaning device, such as figure 1 and figure 2 As shown, the cleaning device includes an ion cleaning system 10, a transport track 20, and a carrying platform 30; the ion cleaning system 10 includes a cavity 100, blowing holes 101 and suction holes 102 disposed on the cavity , the discharge device (not shown in the figure) that is arranged inside the cavity 100 and at the blow hole 101, and the blow pipel...
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