A fully automatic high-precision filling system for ultra-pure gas

Abstract

The invention provides a full-automatic high-precision super-pure gas filling system. A full-automatic high-precision (quality precision superior to 0.5 percent) 6N super-pure gas filling system is adopted, and comprises a super-pure gas source, a super-pure gas storage tank, a vacuum filling chamber, a pipeline vacuumizing device, a vacuum chamber vacuumizing device, a waste recovering and treating device, a stop valve, a heater band, a refrigerating machine, a cold drawing plate, a heating cage, a Coriolis flowmeter, a pressure sensor, a temperature sensor, and an operating console. All pipelines of the system and the inner wall of a container are capable of heating and degassing and repeatedly replacing and cleaning, a filling product is placed under a vacuum environment for filling so that external impurity gases are prevented from reversely permeating, and the super-high purity of the gas is ensured; and temperatures of all parts of the filling system are accurately controlled through a heating control temperature device and a refrigerating device, pressures and working medium flows in all places of a filling pipeline are maintained constant, and high filling mass precision of the gas is finally realized by combining the high-measurement precision Coriolis flowmeter and a full-automatic filling procedure.

Description

technical field [0001] The invention belongs to the field of industrial manufacturing, and relates to a gas filling technology, which can satisfy the high-quality precision (better than 0.5%) filling of 6N ultrapure gas. Background technique [0002] In recent years, the demand for ultrapure gases in microelectronics, heat transfer and other fields has been increasing. In the integrated circuit industry, from the preparation of multi-product silicon to the final annealing process, ultra-pure gas is used in the entire process of IC fabrication. If the gas contains several parts per million of carbon oxides or oxygen impurities, it is Cause pits and affect the quality of subsequent processes. In the field of heat pipe technology in heat transfer, the purity of the internal working fluid is very high. If there is impurity non-condensable gas, it will directly affect its heat transfer performance and service life. In addition, too much or too little filling of the working medi...

AI Technical Summary

Problems solved by technology

[0003] Therefore, in the process of using ultra-pure gas, gas filling is the most critical process. If the design of the filling system or filling process is not reasonable, it will lead to a great reduction in gas purity or filling quality accuracy.

At present, the gas filling system in the industry either focuses on the filling purity or the filling quality accuracy, and the filling process is mostly manual operation, lacking the ultra-pure gas automatic and high-precision filling technology

Images