Substrate processing line and substrate processing method
A substrate processing and substrate technology, applied in conveyor control devices, conveyor objects, conveyors, etc., can solve problems such as the inability to support substrates, the movement of movable conveyor belts cannot be carried out at any time, and achieve the effect of suppressing movement
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no. 1 approach ＞
[0020] figure 1 It is a figure which shows typically an example of the board|substrate processing line which concerns on 1st Embodiment of this invention. In this figure and the figures shown below, the XY orthogonal coordinate axes in which the substrate conveyance direction is the X-axis direction and the orthogonal direction orthogonal to the X-axis direction are the Y-axis direction are appropriately shown. In this substrate processing line 1, a plurality of (two) substrate processing apparatuses 2 and 3 (a plurality of processing apparatuses) are sequentially arranged (arranged) in the substrate conveyance direction X, and the substrate A ( Figure 4 ), and the substrate A is subjected to predetermined processing in each of the substrate processing apparatuses 2 and 3 .
[0021] In the substrate processing line 1, the substrate processing apparatus 2 (another processing apparatus, that is, the second processing apparatus) installed on the upstream side in the substrate c...
no. 2 approach ＞
[0070] Figure 7 It is a figure which schematically shows an example of the substrate processing line concerning 2nd Embodiment of this invention. The substrate processing line 1 of the second embodiment differs from the substrate processing line 1 of the first embodiment in that the arrangement of the substrate processing apparatuses 2 and 3 is reversed from that of the first embodiment. Therefore, the detailed structure of each of the substrate processing apparatuses 2 and 3 is the same as that described above in the first embodiment, and description thereof will be appropriately omitted here.
[0071] In the substrate processing line 1 of the second embodiment, two substrate processing apparatuses 3 and 2 are arranged sequentially along the substrate conveyance direction X, and the substrate A is conveyed along the substrate conveyance direction X, and the substrate A is processed in each of the substrate processing apparatuses 3 and 2 . In such a substrate processing lin...
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