Method for preparing zirconia-based NOx sensor

Abstract

The present invention relates to a method for preparing a zirconium oxide base Nox sensor. The method comprises: providing a NOx sensing unit, an oxygen sensing unit and a heating boy, wherein the NOx sensing unit comprises a NOx sensitive layer, a reference gas channel layer and a zirconium oxide layer, the NOx sensitive layer comprises a NOx test electrode layer, a zirconium oxide layer and a reference electrode, the oxygen sensing unit comprises an oxygen sensitive layer, a reference gas channel layer and a zirconium oxide layer, the oxygen sensitive layer comprises an oxygen test electrode layer, a zirconium oxide layer and a reference electrode, and the heating body layer comprises an insulating layer, a heating electrode, a zirconium oxide layer, a pin hole and a pin; and carrying out laminated co-firing on the NOx sensing unit, the oxygen sensing unit and the heating body layer to prepare the zirconium oxide base Nox sensor, wherein the heating body is positioned between the NOx sensing unit and the oxygen sensing unit, low temperature glass powder is added among the NOx sensing unit, the oxygen sensing unit and the heating body, and low temperature co-firing is performed at a temperature of 800-1200 DEG C.

Description

technical field [0001] The invention relates to a method for preparing a zirconia-based NOx sensor. Background technique [0002] With the acceleration of my country's urbanization process, the consumption of fossil fuels has increased rapidly, and many toxic and harmful gases have been released into the atmosphere to pollute the environment. The most typical type is NOx gas, which not only causes photochemical smog and acid rain, Destruction of the ozone layer will also have side effects on the human respiratory system, such as hair loss, throat inflammation, impaired vision, and decreased respiratory system resistance. Therefore, nitrogen oxide emission reduction is listed as one of the requirements for environmental protection. Many toxicological and epidemiological studies have found the side effects of NOx. NO 2 And NO gas (collectively known as NOx) is currently receiving greater attention. The problem is exacerbated by the high concentration of this gas on some roa...

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Problems solved by technology

But his shortcomings are also obvious. First, when the concentration of NOx is very low, the decomposed O 2 The gas concentration is also very low, and the generated current is very small. When analyzing a small current, the cost of the subsequent processing circuit will increase. Without increasing the circuit cost, the only way to reduce the sensitivity of the test is to It is said that this device is difficult to test the lower NOx concentration; secondly, the preparation process is complicated, and there are many preparation steps, and any mistake in these steps will lead to the waste of all previous efforts

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