Heat treatment furnace
A technology for heat treatment furnaces and furnace bodies, applied in furnaces, furnace types, lighting and heating equipment, etc., can solve problems such as difficulty in achieving uniform sintering and uneven sintering state, and achieve prevention of temperature deviation, good heat treatment, and reduction of heat. The effect of small temperature deviations
Active Publication Date: 2016-10-26
MURATA MFG CO LTD
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Problems solved by technology
[0005] As a result, a temperature distribution will be formed in the firing chamber 102, making it difficult to achieve uniform firing, resulting in uneven firing state
Method used
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Embodiment Construction
[0061] Hereinafter, the present invention will be further specifically described through the embodiments of the present invention.
[0062] In each of the following embodiments, a heat treatment furnace used for heat treatment of an unfired ceramic molded body in the manufacture of ceramic electronic components will be described as an example.
[0063] [Embodiment 1]
[0064] figure 1 It is a side cross-sectional view showing the structure of a heat treatment furnace 10 according to one embodiment (Embodiment 1) of the present invention, figure 2 is its top sectional view, image 3 is the front section view.
[0065] Such as figure 1 , 2 , 3, the heat treatment furnace 10 includes in the interior of the furnace body 1 (furnace body interior) 2: a heating device (heater) 3, a gas supply pipe 4 for supplying gas for adjusting the ambient gas, and a roller 6 etc. Conveying mechanism 7, this conveying mechanism 7 is used for object to be heat-treated (the box that accommo...
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PROBLEM TO BE SOLVED: To suppress temperature irregularity in a heat treatment area in a heat treat furnace for performing heat treatments on a heat treatment target with gas supplied from gas supply pipes.SOLUTION: A heat treat furnace 10 for continuously performing heat treatments on a heat treatment target 15 by transporting a heat treating area 12 in a furnace interior 2 in a predetermined transport direction is provided. Gas supply pipes 4 are inserted into a plurality of positions along the transport direction A in the furnace interior so as to be orthogonal to the transport direction. A gas supply pipe configured so that a tip end 14a inserted into the furnace interior is sealed, gas ports 24 for jetting gas into the furnace interior are provided at a plurality of positions along a longitudinal direction of a circumferential wall 14b, and so that the gas is supplied from an opposite open end 14c to the tip end is used as each of the gas supply pipes. In addition, if attention is paid to a pair of gas supply pipes adjacent to each other in the transport direction among the plurality of gas supply pipes inserted into the furnace interior, one gas supply pipe 4a and the other gas supply pipe 4b are inserted into the furnace interior from opposite sides.
Description
technical field [0001] The present invention relates to a heat treatment furnace used, for example, in the manufacturing process of ceramic electronic components, and more specifically, to a heat treatment furnace for continuously heat-treating an object to be heat-treated while supplying gas (ambient gas) from a gas supply pipe. Background technique [0002] For example, ceramic electronic parts such as laminated ceramic capacitors are usually manufactured through a binder removal process and a firing process. Mixture, the above-mentioned sintering process is to carry out formal sintering after the debinding process, and the above-mentioned debinding process and sintering process are implemented using a heat treatment furnace that can control the shielding gas, temperature, and the like. [0003] Regarding this type of heat treatment furnace, Figure 13 One of the heat treatment furnaces is shown in . This heat treatment furnace is a kind of sintering furnace, and many rol...
Claims
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IPC IPC(8): C04B35/638
CPCF27B9/04F27B9/30
Inventor 松冈祥
Owner MURATA MFG CO LTD