Electromagnetic actuating two-dimensional rapid deflecting mirror system
An electromagnetic actuation and deflection mirror technology, applied in the field of electromagnetic actuation two-dimensional fast deflection mirror system, can solve the problems of small output force of voice coil motor, limited output range, limited system response speed, etc., to achieve system stability and convenience Precisely controlled effects
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[0024] An embodiment of the present invention provides an electromagnetically actuated two-dimensional fast deflection mirror system, such as figure 1 As shown, it includes a mirror module 1, a moving module 2 and a static module 3, and the mirror module 1, the moving module 2 and the static module 3 are sequentially connected; Figure 2A Top view of the electromagnetically actuated two-dimensional fast deflecting mirror system provided by the embodiment of the present invention;
[0025] The moving stage module includes a permanent magnet assembly and a support plate assembly, the static stage module includes an electromagnet assembly, the permanent magnet assembly is fixedly connected to the support plate assembly, and the electromagnet assembly generates a magnetic field to drive the permanent magnet assembly. The magnet assembly moves, and the support plate assembly deflects along the horizontal axis of the support plate assembly under the movement of the permanent magnet ...
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