Dual-feedback high-precision light-beam aiming control device

A dual feedback, beam technology, applied in optics, nonlinear optics, instruments, etc., can solve problems such as affecting the accuracy of laser beam control

Inactive Publication Date: 2007-07-25
HARBIN INST OF TECH
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Problems solved by technology

The invention can solve the problem that the accuracy of controlling the reflection angle of the laser beam is affected by the deformation of the reflection mirror surface of the two-dimensional deflection mirror

Method used

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  • Dual-feedback high-precision light-beam aiming control device

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Embodiment Construction

[0005] Illustrate present embodiment in conjunction with Fig. 1, it is by computer 1, deflection mirror driver 2, two-dimensional deflection mirror 3, laser device 4, image acquisition card 5, CCD camera 6, convex lens 7, telescope 8, beam splitter mirror 9, total internal reflection Composed of prism 10 and A / D converter 11; the deflection mirror control data output end of computer 1 is connected to the control input end of deflection mirror driver 2, and the control drive output end of deflection mirror driver 2 is connected to the control signal input end of two-dimensional deflection mirror 3 , the mirror surface deflection amount detection signal output end of the two-dimensional deflection mirror 3 is connected to the signal input end of the A / D converter 11, the data output end of the A / D converter 11 is connected to the mirror surface deflection amount data input end of the computer 1, and the laser 4. The output laser beam is reflected by the mirror end of the two-dime...

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Abstract

The invention is a control device for double-feedback high-accuracy light beam aiming. The control data output end of a computer is connected with the control data input end of a deflecting mirror driver, the output end of the deflecting mirror driver is connected with the control data input end of a 2-D deflecting mirror, the output end of detection signal of surface deflection quantity of the 2-D deflecting mirror is connected with the data input end of surface deflection quantity of the computer through an A / D converter, and the light beam outputted by a laser is reflected into the input end of a plate, where a part of the light beam is outputted by reflection of the plate and the other is transmitted by the plate and inputted into a total internal reflection mirror thorugh the plate, then inputted into the input end of a telescope by reflection of the total internal reflection mirror and the plate, then inputted into the input end of a lens through the output end of the telescope, and finally inputted into the input end of a CCD camera through the output end of the lens, the signal output end of the CCD camera is connected with the signal input end of an image collection card, and the data output end of the image collection card is connected with the image data input end of the computer. The invention can make high accuracy control of the deflection angle of the light beam outputted by reflection of two-dimensional deflecting mirror, where the control error<=0.5 mu rad.

Description

Technical field: [0001] The invention relates to the technical field of laser control, in particular to a double-feedback high-precision beam aiming control device. Background technique: [0002] In the existing laser beam aiming control devices, piezoelectric ceramics are mostly used to drive optical mirrors to change the outgoing direction of the beam, and the feedback unit of the closed-loop control is a micro-displacement sensor. Since the optical mirror is not an ideal rigid body, it will be deformed under the drive of piezoelectric ceramic stretching force, which will affect the deflection direction of the beam. In the beam aiming control device, the displacement sensor can only measure the expansion and contraction of piezoelectric ceramics, but cannot measure the actual deflection of the optical mirror. It can be seen that the deformation of the optical mirror surface is an uncertain factor affecting the control accuracy of the aiming device. It is difficult for the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/29G02F1/01G02F1/00
Inventor 马晶谭立英于思源陈云亮韩琦琦
Owner HARBIN INST OF TECH
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