Probe for 3D shape measuring device

Abstract

PROBLEM TO BE SOLVED: To provide a three-dimensional shape measurement device probe that is small in a measurement force upon measuring not only a vertical plane but also a horizontal plane, and hardly generates an oscillation.SOLUTION: A three-dimensional shape measurement device probe 1 comprises: an attachment section that is attached to a three-dimensional shape measurement device; slide sections 3a to 3c that are slidably connected to the attachment section; an arm support section 20 that is supported movably upward and downward with respect to the slide section; and an arm 22 that is suspended at a bottom end of the arm support section, and includes a stylus 21 arranged at the bottom end thereof. An upward / downward movement mechanism of the arm support section with respect to the slide section consists of a slide-side member, an arm-side member and five spheres 55 made from a magnetic body sucked due to a magnetic suction force between opposing vertical planes of the slide-side member and the arm-side member and brought into contact with the vertical plane. The sphere rolls in contact with the vertical plane between the slide-side member and the arm-side member, and thereby the arm support section moves on a vertical axis. Further, the magnetic suction force is exerted between the slide-side member and the arm-side member, and thus, a restitutive force is exerted with respect to the movement on the vertical axis of the arm support section.

Description

technical field [0001] The present invention relates to a probe for a three-dimensional shape measuring device that scans and measures a three-dimensional shape with high precision and low measuring force. Background technique [0002] A conventional probe for a three-dimensional shape measuring device (hereinafter, referred to as a probe) capable of scanning and measuring the three-dimensional shape of an object to be measured with high precision and low measuring force has the configuration disclosed in Patent Document 1. Figure 12 , 13 The configuration of the probe disclosed in Patent Document 1 is shown. [0003] exist Figure 12 Among them, the probe 101 is detachably mounted on the three-dimensional shape measuring device 201 via the mounting member 102 . The swing part 103 is swingably connected to the mounting table 104b fixed to the lower part of the attachment member 102, and the arm attachment part 120 is held by the swing part 103 so as to be movable up and do...

AI Technical Summary

Problems solved by technology

In addition, when the thickness of the leaf spring is reduced, the rigidity decreases, and when the thickness of the leaf spring is increased, the mass of the movable part increases, so the natural frequency of the detector decreases.

When the natural vibration frequency is lowered, it becomes easy to cause vibration during measurement, and measurement data may cause measurement errors due to vibration

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