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Linear holding valve

A locking valve, linear technology, applied in the field of glass vacuum coating, can solve the problems of inconvenient maintenance and lack of isolation, and achieve the effect of improving efficiency and facilitating maintenance

Active Publication Date: 2014-08-06
SHANGHAI NORTH GLASS COATING TECHNOLOGY INDUSTRIAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem that the sputtering chambers of the current glass coating vacuum film production line are connected and not isolated, resulting in inconvenient maintenance, a linear lock valve is now provided.

Method used

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Embodiment Construction

[0019] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0020] Such as figure 1 and figure 2 As shown, the embodiment of the present invention provides a linear lock valve for a glass vacuum coating sputtering chamber, including a housing, a lifting mechanism and a door panel 15, the door panel 15 is located in the housing, and is connected with the lifting mechanism outside the housing Connection, an ultra-thin cylinder 14 is installed between the two door panels 15, the lifting mechanism can drive the door panel 15 to move, and the ultra-thin cylinder 14 can push the door panel 15 close to the inner wall of the housing to isolate the sputtering chamber. Wherein, the housing includes an upper housing 7 and a lower housing 8; the lifting mechanism includes a brake motor 4 and a screw scre...

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Abstract

The invention discloses a linear holding valve, and belongs to the technical field of glass vacuum coating. The linear holding valve is used for sputtering chambers for glass vacuum coating, and comprises a shell, a lifting mechanism and door plates. The door plates are in the shell, and are connected with the lifting mechanism outside the shell, an ultrathin cylinder is arranged between the two door plates, the lifting mechanism can drive the door plates to move, the ultrathin cylinder can push the door plates to abut the inner wall of the shell, so as to isolate the two sputtering chambers from the interface. According to the invention, the lifting mechanism drives the door plates, and the ultrathin cylinder between the door plates pushes the door to abut the inner wall of the shell, so as to isolate the sputtering chambers and ensure that not all the sputtering chambers need air for repair. The linear holding valve is convenient for repair and has improved efficiency.

Description

technical field [0001] The invention relates to the technical field of glass vacuum coating, in particular to a linear lock valve used in a glass vacuum coating production line. Background technique [0002] The sputtering chambers of the glass coating vacuum film production line are generally connected, and there is no isolation mechanism. When servicing one of the chambers, all chambers are ventilated together. In this way, all the sputtering chambers will be pumped before re-working, which takes a long time to pump. Contents of the invention [0003] In order to solve the problem that the sputtering chambers of the current glass coating vacuum film production line are connected and not isolated, resulting in inconvenient maintenance, a linear lock valve is provided. The specific technical scheme is as follows: [0004] A linear lock valve, used in a sputtering chamber for vacuum-coated glass, comprising a housing, a lifting mechanism and a door panel, the door panel ...

Claims

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Application Information

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IPC IPC(8): C03C17/00
Inventor 沈双宇
Owner SHANGHAI NORTH GLASS COATING TECHNOLOGY INDUSTRIAL CO LTD