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Method for detecting leakage of silicon molten soup

A melting soup and gas detector technology, applied in the detection field, can solve problems such as damage to parts and structures, and achieve the effect of reducing losses

Inactive Publication Date: 2016-11-16
MOTECH INDUSTRIES
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, when the molten silicon soup leaks and penetrates enough to be sensed by the temperature sensor, the molten silicon soup has usually melted through several layers of insulating materials, so the leaked silicon molten soup has caused damage to parts and structures in the furnace body. damage to

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  • Method for detecting leakage of silicon molten soup
  • Method for detecting leakage of silicon molten soup
  • Method for detecting leakage of silicon molten soup

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Embodiment Construction

[0028] When the molten silicon soup leaks out and reacts with the graphite material outside the crucible, a large amount of carbon monoxide and / or carbon dioxide will be additionally produced. After research, it was found that such a phenomenon may be caused by the oxygen content in the furnace body during the crystal growth process, and the furnace body, support plate and insulating material in the crystal growth equipment are usually graphite. Among them, the main source of the oxygen component is the quartz crucible, and the trace oxygen component comes from the silicon raw material. When the leaked silicon melt comes into contact with graphite such as the furnace body, support plate and insulating material, the possible reactions are as follows:

[0029] Si+SiO 2 →SiO (gaseous)

[0030] Si(molten)+C→SiC(solid state)

[0031] SiO (gaseous) + C → SiC (solid) + CO or SiC (solid) + CO 2

[0032] o 2 +C→CO or CO 2

[0033] Therefore, the present invention utilizes this ...

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Abstract

The invention discloses a method for detecting leakage of silicon melt. The method is suitable for detecting leakage of the silicon melt in a crucible of a furnace body. A plurality of graphite sheets coat around the crucible. The method for detecting the leakage of the silicon melt comprises the following steps of carrying out a detection step by using a gas detector to detect the content of carbon monoxide or carbon dioxide; taking a first detected content value of carbon monoxide or carbon dioxide as a reference when a heating temperature of the crucible is maintained at a stable state; carrying out a determination step to determine whether the silicon melt is leaked from the crucible or not; and determining the silicon melt as leakage when a subsequent detected second content value of carbon monoxide or carbon dioxide appears a sharp increase relative to the first content value.

Description

technical field [0001] The present invention relates to a detection method, and in particular to a detection method for leakage of silicon melt. Background technique [0002] The silicon growth process is usually carried out in a crucible inside the furnace. When performing crystal growth, the silicon material is laid in the crucible first, and then the silicon crystal material is heated by a heater installed in the furnace body. However, sometimes the crucible may be broken during the crystal growth process due to poor quality of the crucible or improper filling of silicon material. The rupture of the crucible will cause the silicon molten soup to leak out. [0003] Because the leakage of the silicon melt will seriously damage the parts and structures inside the furnace, resulting in a significant increase in manufacturing costs. Therefore, at present, abnormal changes in temperature or abnormal changes in heater power are used to detect whether the molten silicon soup i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M3/04
Inventor 杨镇豪
Owner MOTECH INDUSTRIES