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Optical module and electronic apparatus

An optical module and conductivity technology, which is applied in the field of optical modules and electronic equipment, can solve the problems of reduced resolution of wavelength-variable interference filters, uneven deflection of diaphragms, and deterioration of parallelism of reflective films, etc., to shorten the stabilization time , prevent short circuit, suppress deterioration of parallelism effect

Active Publication Date: 2014-08-06
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in the variable wavelength interference filter of Patent Document 1, for example, when the rigidity or thickness of the diaphragm is not uniform, when the gap size of the gap between the reflecting films is changed, the diaphragm cannot be flexed uniformly, and the reflecting film may not be uniformly bent. Concerns about the deterioration of the parallelism between each other
In addition, in the initial state where no voltage is applied between the electrodes, the reflective films may not maintain parallelism. At this time, if the gap size is changed by electrostatic attraction, the parallelism between the reflective films may be further increased. Aggravation, the problem that the resolution of the variable-wavelength interference filter decreases

Method used

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  • Optical module and electronic apparatus
  • Optical module and electronic apparatus
  • Optical module and electronic apparatus

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no. 1 approach

[0072] Next, a first embodiment of the present invention will be described based on the drawings.

[0073] The structure of the spectrometer

[0074] figure 1 It is a block diagram showing a schematic configuration of the spectrometer of the present invention.

[0075]The spectrometer 1 is an example of the electronic device of the present invention, and it analyzes the light intensity of each wavelength of the measurement object light reflected by the measurement object X, and measures the spectral spectrum. In addition, in this embodiment, an example of measuring the measurement object light reflected by the measurement object X is shown, but when a luminous body such as a liquid crystal panel is used as the measurement object X, the light emitted from the luminous body may also be used as the measurement object light. .

[0076] and, if figure 1 As shown, this spectrometer 1 has an optical module 10 and a control unit 20 that processes a signal output from the optical m...

no. 2 approach

[0175] Next, a second embodiment according to the present invention will be described with reference to the drawings.

[0176] In the above-mentioned first embodiment, the control currents in opposite directions in the filter plan view are shown to flow through the first control electrode 571 provided on the fixed substrate 51 and the second control electrode 572 provided on the movable substrate 52 respectively. example. In this regard, the difference between the second embodiment and the above-mentioned first embodiment is that the first control electrode 571 and the second control electrode 572 are not provided, and the control current flows through the reflective films 54 and 55 .

[0177] In addition, in the following description of the embodiment, the same structure as the said 1st embodiment is given the same code|symbol, and the description is abbreviate|omitted or simply.

[0178] Figure 10 It is a schematic diagram of the schematic structure of the fixed reflectiv...

no. 3 approach

[0203] Next, a third embodiment of the present invention will be described with reference to the drawings.

[0204] In the above-mentioned first and second embodiments, the inclination control unit 152 keeps the control current flowing through the control electrodes 571 and 572 (reflective film 54 in the second embodiment) until the vibration of the movable unit 521 ends. , 55), so as to shorten the stabilization time. On the other hand, in the third embodiment, the inclination control unit 152A suppresses the inclination of the movable unit 521 by the repulsive force of the Lorentz force by passing the control current through the control electrodes 571 and 572 , and turns the Lorentz force during feedback control. The repulsive force of the Lenz force is used as the driving force.

[0205] Figure 15 It is a schematic configuration diagram of an optical module 10A of the third embodiment.

[0206] In the variable wavelength interference filter 5B of this embodiment, the re...

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Abstract

The invention relates to an optical module and an electronic apparatus. The optical module includes a stationary substrate (51), a movable substrate (52), a stationary reflecting film (54) provided to the stationary substrate, a movable reflecting film (55) provided to the movable substrate and opposed to the stationary reflecting film, a first control electrode (571) disposed outside the stationary reflecting film in a filter plan view, a second control electrode (572) disposed outside the movable reflecting film in the filter plan view, and opposed to the first control electrode, and a tilt control section (152) adapted to make a first control current flow through the first control electrode, and make a second control current, which has an opposite direction to the first control current in the filter plan view, flow through the second control electrode.

Description

technical field [0001] The present invention relates to optical modules and electronic equipment. Background technique [0002] In the prior art, there is known a wavelength-variable interference filter (for example, Refer to Patent Document 1). [0003] The variable wavelength interference filter (optical resonator) described in Patent Document 1 has a first substrate and a second substrate facing each other, reflective films respectively arranged on the respective substrates and facing each other with a gap between the reflective films interposed therebetween, and electrodes respectively disposed on the respective substrates and facing each other. In such a variable wavelength interference filter, the gap between the reflection films can be adjusted by deforming the diaphragm by applying a voltage between the electrodes. [0004] However, in the variable wavelength interference filter of the above-mentioned Patent Document 1, for example, when the rigidity or thickness ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28G02B26/00
CPCG01J3/26G01J3/51G01N21/31G01N21/35G01N21/658G01N2021/3144G01J3/027G02B26/001
Inventor 松下友纪
Owner SEIKO EPSON CORP