Chromium-aluminum alloy target as well as preparation method and application thereof
A technology of chrome-aluminum alloy and target material, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve problems such as poor corrosion resistance, poor corrosion resistance, and failure to meet the functional requirements of corrosion resistance , to achieve the effect of low cost, uniform tissue size and simple process
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Embodiment 1
[0032] The invention relates to a method for preparing a chromium-aluminum alloy target, comprising the following steps:
[0033] (1), weighing and mixing: the aluminum powder with a purity of 99.99% and a purity of 99.99% is weighed and mixed according to the mass ratio of 70% chromium and 30% aluminum mass ratio;
[0034] (2) Electrode pressing: Place the mixed metal chromium and aluminum alloy materials in a nitrogen protective atmosphere to prevent the materials from being damp and oxidized, and put the prepared chromium and aluminum materials into the press evenly to press them into electrodes. Each electrode is controlled at 5.8 kg, in which chromium and aluminum are mixed evenly and clothed, and the pressed electrode is placed in a nitrogen protective atmosphere to prevent the material from being damp and oxidized;
[0035] (3) Welding electrodes: The two pressed electrodes are welded into smelting electrodes by tungsten argon arc welding;
[0036] (4) Vacuum consumabl...
Embodiment 2
[0045] The invention relates to a method for preparing a chromium-aluminum alloy target, comprising the following steps:
[0046] (1), weighing and mixing: the aluminum powder with a purity of 99.99% and a purity of 99.99% is weighed and mixed according to the mass ratio of chromium to 50%, and the aluminum mass ratio to 50%;
[0047] (2) Electrode pressing: Place the mixed metal chromium and aluminum alloy materials in a nitrogen protective atmosphere to prevent the materials from being damp and oxidized, and put the prepared chromium and aluminum materials into the press evenly to press them into electrodes. Each electrode is controlled at 5.8 kg, in which chromium and aluminum are mixed evenly and clothed, and the pressed electrode is placed in a nitrogen protective atmosphere to prevent the material from being damp and oxidized;
[0048] (3) Welding electrodes: The two pressed electrodes are welded into smelting electrodes by tungsten argon arc welding;
[0049] (4) Vacuum ...
Embodiment 3
[0058] The invention relates to a method for preparing a chromium-aluminum alloy target, comprising the following steps:
[0059] (1), weighing and mixing: the aluminum powder with a purity of 99.99% chromium powder and a purity of 99.99% is weighed and mixed according to the mass ratio of 80% chromium and 20% aluminum mass ratio;
[0060] (2) Electrode pressing: Place the mixed metal chromium and aluminum alloy materials in a nitrogen protective atmosphere to prevent the materials from being damp and oxidized, and put the prepared chromium and aluminum materials into the press evenly to press them into electrodes. Each electrode is controlled at 5.8 kg, in which chromium and aluminum are mixed evenly and clothed, and the pressed electrode is placed in a nitrogen protective atmosphere to prevent the material from being damp and oxidized;
[0061] (3) Welding electrodes: The two pressed electrodes are welded into smelting electrodes by tungsten argon arc welding;
[0062] (4) ...
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