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processing module

A technology for processing modules, processing chambers, used in transport and packaging, coating, conveyor items, etc.

Active Publication Date: 2018-01-23
MEYER BURGER (GERMANY) GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The problem with constructing inexpensive continuous plants is to meet the frequently changing requirements of the products produced

Method used

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Experimental program
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Embodiment Construction

[0051] figure 1 An embodiment of a processing module according to the invention is schematically shown in a vertical section in the direction of substrate transport. A processing chamber 2 is located in the processing module 1 . The carrier device 3 is used as the bottom of the processing chamber 2 , and the substrate 4 is placed flat on the carrier device 3 . exist figure 1 The processing chamber 2 exemplarily shown in is a parallel plate reactor for coating a substrate 4 with a plasma-assisted deposition layer.

[0052] The gaseous starting material for the layer deposition is guided in the process chamber 2 via the gas connection assembly 5 into the gas shower 31 . The gas sparger 31 serves as the first HF electrode in the parallel plate reactor. The carrier 3 with the substrate 4 is the second electrode of the parallel-plate reactor, which is aligned parallel to the gas shower 31 .

[0053] In order for HF electrical power to flow from the gas shower 31 via the carrie...

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Abstract

The invention relates to a processing module having at least one evacuatable processing chamber located in the processing module and at least one carrier device passing horizontally through the processing module and movable in at least one substrate transport direction, The carrying device is used to respectively accommodate at least one planar substrate that needs to be processed in the processing chamber. It is an object of the present invention to provide a processing module of the above-mentioned type which enables uniform and high-quality processing of all substrates at high production speeds with the lowest possible equipment outlay. This object is achieved by a processing module of the above-mentioned type, wherein the at least one processing chamber can be physically closed relative to the processing module by a carrier which can be positioned in at least one closing direction transverse to the substrate transport direction A change is made above, wherein the at least one carrying device constitutes the bottom of the at least one processing chamber.

Description

technical field [0001] The invention relates to a processing module having at least one process chamber inside the processing module which can be evacuated and at least one chamber which runs horizontally through the processing module and is movable in at least one substrate transport direction. The carrying device is used to accommodate at least one planar substrate that needs to be processed in the processing chamber. Background technique [0002] Large in-line plants have proven effective when producing planar products such as solar cells on a large scale. Such continuous plants are, for example, continuous roller furnaces for the heat treatment of substrates, and continuous coating plants, such as are known from WO 2011 / 080659 A1. In a device of this type, a plurality of substrates (such as square solar cell wafers) are placed on a carrier and then passed through a device of modular construction with a plurality of processing modules in which the corresponding Substrat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/677
CPCH01L21/67173H01L21/67706H01L21/67751H01L21/6776C23C16/45565C23C16/458C23C16/46C23C16/463C23C16/50
Inventor J·迈D·米勒S·拉舍克A·海因策
Owner MEYER BURGER (GERMANY) GMBH
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