The invention discloses a hot melting forming device and method for a synthetic
quartz glass cylinder, through modular structural design, the synergistic effect of positioning, exhausting, pressing and forming is achieved, and the hot melting forming device for the synthetic
quartz glass cylinder specifically comprises a
graphite pressure head connecting rod, a
graphite pressure head, a
graphite center rod and a forming mold. According to the hot-melting forming method for the synthetic
quartz glass cylinder, the device is adopted, a synthetic quartz glass
ingot is pretreated, a low-
impurity demolding material is laid during assembling, gradient heating is conducted on three temperature areas of a
heating furnace, pressurization is conducted after
softening, and then differential cooling is conducted, so that efficient preparation of the high-purity synthetic quartz glass cylinder is achieved; and the purity of the finished product meets the strict requirements of high-precision processes such as
semiconductor wafer processing and thin film deposition on the material purity. According to the invention, the large-
diameter and ultra-long synthetic quartz glass cylinder can be stably produced, the requirement of large-size development of
semiconductor equipment is met, and the blank in the field of large-size high-purity quartz glass cylinder preparation in the prior art is filled.