Graphite purification equipment and process gas shunt device and method
A technology of process gas and splitter device, which is applied in the field of graphite purification equipment, can solve problems such as uneven distribution of process gas, and achieve the effects of shortening the flow stroke, improving uniformity, and uniform distribution of process gas
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[0028] The core of the present invention is to provide a process gas distribution device and method, which effectively solves the problem of uneven distribution of process gas in the reaction area during the graphite purification process; another core of the present invention is to provide a process gas distribution device comprising the above-mentioned Graphite purification equipment.
[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0030] Please refer to figure 1 and figure 2 , figure 1 The structura...
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