Flat-plate image sensor and manufacturing method thereof
A technology of an image sensor and a manufacturing method, applied to radiation control devices and other directions, can solve the problems of inconsistent light-emitting conditions, unstable display, white spots and the like of flat-panel image sensors
Active Publication Date: 2015-04-29
SHANGHAI TIANMA MICRO ELECTRONICS CO LTD +1
View PDF5 Cites 7 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Specifically, for the structure of the flat panel image sensor, the pixels will be affected by temperature and humidity from all directions, resulting in problems such as inconsistent lighting conditions, unstable display, and white spots in the flat panel image sensor.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0065] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals denote the same or similar structures in the drawings, and thus their repeated descriptions will be omitted.
[0066] The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the invention. However, those skilled in the art will appreciate that the technical solutions of the present invention may be practiced without one or more of the specific...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a flat-plate image sensor and a manufacturing method thereof. The flat-plate image sensor comprises a substrate, a first protective layer, an upper electrode layer, an etching barrier layer and a second protective layer, wherein the substrate comprises a pixel zone and a peripheral zone; the pixel zone comprises a sensing element; the peripheral zone comprises at least one mask plate aligning mark; the first protective layer is formed on the sensing element of the pixel zone, and extends above the at least one the mask plate aligning mark of the peripheral zone; the upper electrode layer is formed on the first protective layer in the pixel zone; the etching barrier layer is formed on the first protective layer in the peripheral zone; the second protective layer covers the upper electrode layer and the etching barrier layer; in the peripheral zone, the second protective layer comprises a first opening; the first opening is exposed out of the etching barrier layer; the first opening is matched with the at least one mask plate aligning mark. The flat-plate image sensor can reduce influence of the temperature and the humidity in the first opening on pixels in the pixel zone.
Description
technical field [0001] The invention relates to the field of semiconductor devices, in particular to a flat panel image sensor and a manufacturing method thereof. Background technique [0002] Flat-panel image sensors, especially flat-panel X-ray image sensors, have been widely used and developed in fields such as medical imaging and industrial non-destructive detection. The flat-panel X-ray image sensor is a device that converts X-rays into electrical signals according to light intensity. After X-rays irradiate and penetrate the object, the light intensity changes through absorption, scattering, and divergence. The different light intensities in different regions indicate the differences in the internal structure of different regions of the irradiated object. The X-rays that penetrate the irradiated object are converted into corresponding electrical signals by the flat-panel X-ray suitcase sensor, and finally a grayscale image directly related to the internal structure of ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/146
Inventor 费小磊
Owner SHANGHAI TIANMA MICRO ELECTRONICS CO LTD