Flat panel image sensor and manufacturing method thereof
A technology of image sensor and manufacturing method, which is applied in the direction of radiation control devices, etc., and can solve problems such as inconsistent lighting conditions, white spots, and unstable display of flat-panel image sensors
Active Publication Date: 2017-10-27
SHANGHAI TIANMA MICRO ELECTRONICS CO LTD +1
View PDF5 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Specifically, for the structure of the flat panel image sensor, the pixels will be affected by temperature and humidity from all directions, resulting in problems such as inconsistent lighting conditions, unstable display, and white spots in the flat panel image sensor.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0065] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals denote the same or similar structures in the drawings, and thus their repeated descriptions will be omitted.
[0066] The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the invention. However, those skilled in the art will appreciate that the technical solutions of the present invention may be practiced without one or more of the specific...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a flat-panel image sensor and a manufacturing method thereof. The flat-panel image sensor includes: a substrate having a pixel area and a peripheral area on the substrate, the pixel area includes a sensing element, and the peripheral area includes at least one mask template alignment marks; a first protection layer formed on the sensing element in the pixel area and extending to at least one of the mask alignment marks in the peripheral area; an upper electrode layer formed on the On the first protection layer in the pixel area; an etch barrier layer formed on the first protection layer in the peripheral area; a second protection layer covering the upper electrode layer and the etch barrier layer; Wherein, in the peripheral region, the second protective layer includes a first opening exposing the etch barrier layer, and the first opening is in phase with at least one mask alignment mark. match. It can reduce the influence of the temperature and humidity in the first opening on the pixels in the pixel area.
Description
technical field [0001] The invention relates to the field of semiconductor devices, in particular to a flat panel image sensor and a manufacturing method thereof. Background technique [0002] Flat-panel image sensors, especially flat-panel X-ray image sensors, have been widely used and developed in fields such as medical imaging and industrial non-destructive detection. The flat-panel X-ray image sensor is a device that converts X-rays into electrical signals according to light intensity. After X-rays irradiate and penetrate the object, the light intensity changes through absorption, scattering, and divergence. The different light intensities in different regions indicate the differences in the internal structure of different regions of the irradiated object. The X-rays that penetrate the irradiated object are converted into corresponding electrical signals by the flat-panel X-ray suitcase sensor, and finally a grayscale image directly related to the internal structure of ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/146
Inventor 费小磊
Owner SHANGHAI TIANMA MICRO ELECTRONICS CO LTD