pss yield online monitoring method
A technology of yield rate and detection parameters, applied in the field of PSS yield rate online monitoring system, can solve the problems of difficult to be found, high labor intensity, low manual reliability, etc., and achieve the effect of reducing the influence of human factors and high accuracy
Active Publication Date: 2018-07-13
SHENYANG KINGSEMI CO LTD
View PDF4 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
At present, the confirmation of graphic yield rate is done manually by visual inspection, which has low reliability and high labor intensity, and it is difficult to find tiny defects and single graphic defects
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0027] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0028] The system is specifically a fully automatic on-line detection system for pattern yield after photoresist development. It includes 1 set of electron microscope, 1 set of computer graphics processing system, 1 set of 3-axis mobile platform, and 1 set of wafer sorting system. After the wafer enters the system, the mobile platform moves according to the area settings, and the electron microscope first takes low-magnification photos of each graphic area and stores them in the computer image processing system. The computer compares the shape of the graphics to judge the quality of the image. When the system recognizes the abnormality, locates the abnormal area, zooms in and takes a photo, and then analyzes it, and controls the sorting system to send unqualified products into the wafer. Recycling system is used for recycling processing, and the qualified pr...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention relates to a PSS yield rate online monitoring system. A data processing system is respectively connected with an image collection system, a three-axis mobile platform and a wafer transmission mechanism; the image collection system includes a CCD industrial camera and is arranged above the three-axis mobile platform. The detection method includes: after the wafer enters the system, the mobile platform moves according to the area setting, and the electron microscope first takes low-magnification pictures of each graphic area, and stores them in the computer image processing system. The computer compares the shape of the graphics to judge the quality of the image. When the system recognizes the abnormality, locates the abnormal area, zooms in and takes a photo, and then analyzes it, and controls the sorting system to send unqualified products into the wafer. Recycling system is used for recycling processing, and the qualified products are taken back into the wafer box for the next step. The invention is full-automatic on-line monitoring with high accuracy and can greatly reduce the influence of human factors during manual monitoring.
Description
technical field [0001] The invention belongs to the technical field of LEDs, in particular to a PSS yield rate online monitoring system and a detection method thereof. Background technique [0002] In LED, the patterned substrate (PSS) is the key process of high-power LED production. The graphics formed by the PSS process have a direct impact on the luminous efficiency of the product. After the inspection, the graphics formed after coating, exposure, and development will fail. The products are sorted out for rework, and the qualified products are sent to the next link, which can effectively reduce waste and improve product yield. At present, the confirmation of graphic yield rate is done manually through visual inspection, which has low reliability and high labor intensity, and it is difficult to find tiny defects and single graphic defects. Contents of the invention [0003] In view of the above problems, the object of the present invention is to provide a PSS yield onli...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/956
Inventor 王冲
Owner SHENYANG KINGSEMI CO LTD