Installation structure of electron curtain accelerator

A technology of electronic curtain accelerator and installation structure, which is applied in the direction of electrical components, accelerators, etc., which can solve the problems of heavy workload and difficult adjustment of the position of the electronic curtain accelerator 10, and achieve the effect of rapid adjustment and movement

Inactive Publication Date: 2015-06-17
NUCTECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In the electronic curtain accelerator installation structure of the prior art, the position of the electronic curtain accelerator 10 is not easy to adjust when the electronic curtain accelerator 10 needs to be installed and debugged with peripheral equipment.
In addition, when the installation structure of the electronic curtain accelerator needs to be moved as a whole, the workload is quite large

Method used

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  • Installation structure of electron curtain accelerator
  • Installation structure of electron curtain accelerator
  • Installation structure of electron curtain accelerator

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Embodiment Construction

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0025] The relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. At the same time, it should be understood that, for the convenience of descriptio...

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PUM

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Abstract

The invention discloses an installation structure of an electron curtain accelerator. The installation structure comprises the electron curtain accelerator and a supporting structure. The supporting structure comprises a first supporting part used for supporting the electron curtain accelerator and a second supporting part used for supporting the first supporting part, and the first supporting part is movably arranged relative to the second supporting device. By means of the installation structure of the electron curtain accelerator, the position of the electron curtain accelerator can be quickly adjusted and changed through the relative displacement of the first supporting part and the second supporting part according to the demands of users.

Description

technical field [0001] The invention relates to the field of irradiation equipment, in particular to an electronic curtain accelerator installation structure. Background technique [0002] Electron curtain accelerators are widely used in thin film processing and material surface treatment. [0003] figure 1 It is a structural schematic diagram of the electronic curtain accelerator installation structure in the prior art. Such as figure 1 As shown, the electron curtain accelerator installation structure in the prior art generally includes an electron curtain accelerator 10' and a support structure 20' supporting the electron curtain accelerator 10'. The electron curtain accelerator 10' includes a vacuum cover 11', a titanium window 12' arranged on the vacuum cover 11', an insulating box 13', and the like. The support structure 20' includes a support frame 21' and screws 22', the four support legs of the support frame 21' are fixed on the ground by the screws 22', and the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H7/00
Inventor 张东生刘晋升唐华平刘耀红
Owner NUCTECH CO LTD
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