Digitally controlled MEMS (micro electromechanical system) variable optical attenuator and control method thereof

Abstract

The invention provides a digitally controlled MEMS (micro electromechanical system) variable optical attenuator and a control method thereof. The digitally controlled MEMS variable optical attenuator comprises an array formed by N torsion micro mirrors which can be independently driven, wherein each torsion micro mirror only has two torsion angle states, digital control of input optical signal decrement is achieved by controlling the torsion angle states of each torsion micro mirror, and N is larger than or equal to 9 and less than or equal to 50. The control method of the digitally controlled MEMS variable optical attenuator has the advantages of 1) using digital binary voltage to control the digitally controlled MEMS variable optical attenuator, and achieving high accuracy decrement control of the MEMS variable optical attenuator; 2) needing no feedback control, being capable of effectively suppressing a slow drift caused by electrostatic drive on the MEMS variable optical attenuator, and substantially reducing cost and the size of the high accuracy optical attenuator; 3) being capable of effectively suppressing temperature related insertion loss of the MEMS variable optical attenuator, and substantially reducing temperature influences of a device; 4) substantially reducing cost and the size of a variable optical attenuator instrument by digitally controlling the MEMS variable optical attenuator.

Description

technical field [0001] The invention relates to the field of optical fiber communication, optical fiber sensing and MEMS optical communication devices, in particular to a digitally controlled MEMS adjustable optical attenuator and a control method. Background technique [0002] Adjustable optical attenuator is one of the most widely used optical devices in optical fiber communication systems. Its main function is to dynamically control the power of optical signals. Its specific applications include dynamic regulation of optical signal power in optical communication lines and performance testing of optical communication lines. And optical device testing, etc., and the control accuracy of optical attenuation is getting higher and higher. Especially in optical communication line performance testing and optical device testing, it is necessary to accurately control the amount of light attenuation. [0003] At present, in the commercial MEMS adjustable optical attenuator, the mai...

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Problems solved by technology

[0005] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a digitally controlled MEMS adjustable optical attenuator and a control method for solving the open-loop control of the attenuation of the MEMS adjustable optical attenuator in the prior art. The problem of low precision

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