Electrodeformable thin film array, its preparation method and application

An electrostrictive and electrode array technology, which is applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve the problem of affecting unit deformation and electrical connection stability The performance cannot be well guaranteed, and the electrode leads occupy the film area, etc.

CN104916773BActive Publication Date: 2017-10-20SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2017-10-20

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Abstract

The invention discloses an electro-deformable film array, its preparation method and application. The thin film array includes an electrode film, a core layer film, an electrode array and an electrical connection layer, and the electrical connection layer includes an electrical connection circuit and an electrical barrier layer; a number of electrical contacts, one end of which passes through the electrical barrier layer, and is connected to the electrical connection circuit. The selected point is in electrical contact; the electrode film, the core film, the electrode array and the electrical connection layer are stacked in sequence, and the other end of the electrical contact is in electrical contact with the set point on the electrode array. The preparation method includes: processing and forming the aforementioned structural layers respectively, and then combining them with heat and pressure to obtain the target product. By adopting the above-mentioned design, each component can be prevented from interacting with each other during processing, and the unit quantity scale of the electro-deformable thin film array can be greatly increased. The invention can be used in the fields of braille display, graphic anti-counterfeiting and key, deformation mirror, three-dimensional graphic display, man-machine interface, pressure imaging and the like, and has wide application value.
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Description

technical field

[0001] The invention specifically relates to an electro-deformable film array, its preparation method and application, and belongs to the field of material science. Background technique

[0002] Electrodeformable film material is an ion-type electrically actuated deformation material, which has outstanding advantages such as light weight, good flexibility, low driving voltage, rapid response and large deformation. It can be used to make deformation devices and mechanical sensing devices. It is a new type of intelligent material that has emerged in the past two decades and has great application potential.

[0003] Electrodeformable film materials are usually used as a whole in strips or blocks. For example, Japan’s EAMEX company has developed a robotic fish product that uses the bending deformation of strip materials to push fish to swim; The repeated vibration deformation of thin film strip materials simulates the flying action of birds; M. Shahinpoor of the...

Examples

preparation example Construction

[0082] Another aspect of the present invention provides a method for preparing an electrodeformable thin film array, which mainly includes:

[0083] Provide core film, electrode film and electrode array;

[0084] Provides electrical connection layers including:

[0085] forming an electrical connection circuit with a predetermined structure on the substrate,

[0086] An electrical barrier layer is formed on the electrical connection circuit, and more than one through hole directly reaching the electrical connection circuit is formed on the electrical barrier layer,

[0087] Adding conductive material to the one or more through holes to form one or more electrical contact points, and electrically contacting the electrical contact points with selected points on the electrical connection line;

[0088] The electrode film, the core layer film, the electrode array and the electrical connection layer are sequentially arranged along the set direction, and the electrical contacts on...

Embodiment 1

[0138] Example 1 A method for preparing an electro-deformable film array based on a thermoplastic polyurethane core layer, comprising the following steps:

[0139] (1) Core layer film: The thermoplastic polyurethane and ionic liquid dispersion liquid is coated on the substrate, and the core layer film 2 with a thickness of 100 μm is peeled off from the substrate after evaporating the solvent.

[0140] (2) Electrode film: the metal Ag nanoparticle dispersion liquid was coated on the substrate, and the Ag nanopolymer electrode film 1 with a thickness of 5 μm was obtained after evaporating the solvent.

[0141] (3) Electrode array: as shown in FIG. 3 , after depositing the electrode film 1 on the substrate, the required electrode array pattern (electrode array 3 for short) is engraved on the substrate by laser engraving.

[0142] (4) Electrical connection layer: such as Figure 4a As shown, 4 μm polyethylene naphthalate (PEN) film 9 is used as the substrate, and the Figure 4b ...

Embodiment 2

[0147] Embodiment 2 A method for preparing an electro-deformable film array based on an ionomer Nafion core layer, comprising the following steps:

[0148] (1) Core layer membrane: Nafion ionic membrane and ionic liquid dispersion are coated on the substrate, and the solvent is evaporated and peeled off from the substrate to obtain a 100 μm thick core layer membrane 2 .

[0149] (2) Electrode film: Dissolve graphene and carbon nanotubes in an organic solvent in a certain proportion to form a dispersion liquid, coat the dispersion liquid on the substrate 7, and form a graphene / carbon nanotube film with a certain thickness after evaporating the solvent. Put the graphene / carbon nanotube film into an alkaline solution of ammonium salt and nickel salt, keep warm, wash, and anneal to obtain a nickel oxide-graphene / carbon nanotube nanoelectrode film 1 with a thickness of 5 μm.

[0150] (3) Electrical connection layer: see Figure 4a As shown, 4 μm polyethylene naphthalate (PEN) film...