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Micro/nano particle transfer method having micro force sensing and liquid drop self-calibration functions, and apparatus for realizing the same

A transfer method and self-calibration technology, which is applied in the direction of fluid pressure measurement using capacitance changes, multiple fluid ratio control, etc., can solve the problems that cannot be analyzed by force, cannot realize closed-loop control, and cannot achieve capillary by micro/nano particle transfer methods. Force detection and other issues, to achieve the effect of soft pickup and reliable release, reliable release

Inactive Publication Date: 2015-10-21
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the existing micro / nano particle transfer method based on capillary force cannot realize capillary force detection, which leads to the inability to analyze the force of the micro / nano particle transfer process, and cannot realize closed-loop control. Micro / nano-particle transfer method with micro-force sensing and droplet self-calibration functions and device for realizing the method

Method used

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  • Micro/nano particle transfer method having micro force sensing and liquid drop self-calibration functions, and apparatus for realizing the same
  • Micro/nano particle transfer method having micro force sensing and liquid drop self-calibration functions, and apparatus for realizing the same

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specific Embodiment approach 1

[0025] Embodiment 1: The micro / nanoparticle transfer method with micro-force sensing and droplet self-calibration functions described in this embodiment includes the following steps:

[0026] Step 1: Distribute a droplet at the position where the micro / nanoparticles are to be released, and the droplet is defined as an operating droplet;

[0027] Step 2: Move the operating probe with micro-force sensing function to the top of the operating droplet and contact with the operating droplet, and control the contact depth and separation speed of the operating probe to obtain the pick-up liquid required for the transfer of micro / nanoparticles Droplets, the remaining droplets at the position where the micro / nanoparticles are to be released are defined as released droplets;

[0028] Step 3: Move the operation probe to the top of the micro / nano particles, and rely on the capillary force of picking up the droplets to pick up the micro / nano particles;

[0029] Step 4: Move the operation p...

specific Embodiment approach 2

[0032] Embodiment 2: This embodiment is a further limitation of the micro / nanoparticle transfer method with micro-force sensing and droplet self-calibration functions described in Embodiment 1. actuators to change the contact morphology of the liquid bridge and control the volume ratio of operating droplets to releasing droplets.

[0033] The micro-actuators can be spherical particles, cones, power-law surfaces and other structures of different shapes. The micro-actuators of different structures and shapes can not only change the contact shape of the liquid bridge (corresponding to different liquid bridge capillary forces), but also correspondingly. The volume ratio of the manipulated droplet after acquisition can be controlled.

specific Embodiment approach 3

[0034] Specific implementation three: combination figure 1 This embodiment is described. This embodiment is a specific application of the micro / nanoparticle transfer method with micro-force sensing and droplet self-calibration functions described in Embodiment 1. In this embodiment, microsphere particles with a diameter of 20 μm-100 μm are used. That is, the micro / nano particles are used as the operation object, and the precise electric displacement platform is used to control the movement of the operation probe.

[0035] Step 1: Distribute an operation droplet in advance at the position to be released, and the volume of the operation droplet corresponding to the microsphere particles with a diameter of 20μm-100μm is 0.1nL-0.73nL.

[0036] Step 2: Adjust the precision electric displacement platform to align the axis of the operation probe with the axis of the assigned operation droplet, and move to the operation droplet at a high speed of about 40μm / s; when the operation probe...

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Abstract

The invention, which relates to the micro / nano particle operation technology, relates to a micro / nano particle transfer method having micro force sensing and liquid drop self-calibration functions, and an apparatus for realizing the same. Therefore, a problem that capillary force detection can not be realized by using the existing capillary-force-based micro / nano particle transfer method can be solved. According to the method, one operating liquid drop is allocated at a micro / nano particle to-be-released position; an operating probe having a micro force sensing function is used for dipping and taking the liquid drop, the operating probe is moved above the micro / nano particle, and picking up of the micro / nano particle is realized by the capillary force for picking up the liquid drop; and the operating probe is moved to a to-be-released position and releasing of the micro / nano particle is realized by using the capillary force for releasing the liquid drop. According to the invention, the liquid bridge capillary force during the micro / nano particle transfer process can be detected in real time and the precision is at an nN order; on the basis of the self-calibration characteristic of the capillary force and the liquid drop, reliable releasing of the micro / nano particle can be realized; and a proper liquid drop operating condition can be created by controlling the speed of liquid drop dipping by the probe and changing the structural morphology of the end effector.

Description

technical field [0001] The invention relates to micro / nano particle manipulation technology, in particular to a micro / nano particle transfer technology with micro force sensing and droplet self-calibration functions. Background technique [0002] With the gradual reduction of the feature size of micro-objects, the size effect and surface effect become more and more prominent, and the adhesion force relative to the gravity will gradually occupy the dominant position. The droplet-based capillary force micro / nanoparticle transfer method has unique flexibility, can adapt to micro-objects with complex structures, avoid the stress concentration caused by traditional mechanical clamping, and realize self-calibration in micro / nanoparticle release. Existing capillary force manipulation tools do not have the function of micro-force detection, and cannot detect the dynamic capillary force in the process of micro / nanoparticle transfer in real time. In addition, with the further reducti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/12G05D11/13
Inventor 王乐锋苏凤婷范增华荣伟彬孙立宁
Owner HARBIN INST OF TECH
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