Preparation method of large-size silicon nitride crucible
A silicon nitride crucible and large-scale technology, applied in the field of crucibles, can solve rare problems and other problems, and achieve the effects of simple operation, stable resistivity and high quality of silicon crystals
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Embodiment 1
[0028] (1) After uniformly mixing silicon nitride powder, polyacrylic acid, silicon dioxide powder, silicon magnesium nitride, polyvinyl alcohol and a solvent, a slurry is obtained;
[0029] Among them, the α phase content in silicon nitride powder is ≥80%, the purity is ≥99.99%, and the particle size is submicron; the amount of polyacrylic acid added is 3% of the weight of the silicon nitride powder; the purity of silicon dioxide is ≥99.99%, and the particle size It is submicron, the mass ratio of silicon dioxide and silicon magnesium nitride is 1:3, and the addition amount of the two is 2% of the weight of silicon nitride powder; the purity of polyvinyl alcohol is ≥99.9%, and the degree of polymerization is 1000 , the addition amount is 1.5‰ of the weight of the silicon nitride powder; the addition amount of the solvent is 30% of the weight of the silicon nitride powder, and the solvent is a mixture of water and ethanol with a volume fraction ≥ 95% in a volume ratio of 1:1; t...
Embodiment 2
[0034] (1) After uniformly mixing silicon nitride powder, polyethylene glycol, silicon dioxide powder, silicon magnesium nitride, polyvinyl alcohol and a solvent, a slurry is obtained;
[0035] Among them, the content of α phase in the silicon nitride powder is ≥80%, the purity is ≥99.99%, and the particle size is submicron; the amount of polyethylene glycol added is 1% of the weight of the silicon nitride powder; the purity of silicon dioxide is ≥99.99% , the particle size is submicron, the mass ratio of silicon dioxide and magnesium silicon nitride is 1:1, and the addition amount of the two is 10% of the weight of the silicon nitride powder; polyvinyl alcohol, the degree of polymerization is 1000, and the addition amount is 1‰ of the weight of silicon nitride powder; the amount of solvent added is 70% of the weight of silicon nitride powder, and the solvent is a mixture of water and ethanol with a volume fraction ≥ 95% in a volume ratio of 1:1; the solid of the obtained slurr...
Embodiment 3
[0040] (1) Add silicon nitride powder, humic acid, silicon dioxide powder, magnesium silicon nitride, carboxymethyl cellulose and solvent into the ball mill, and wet mix with 100r / min ball mill for 10 hours. After mixing evenly, a slurry is obtained. ;
[0041] Among them, the α-phase content in the silicon nitride powder is ≥80%, the purity is ≥99.99%, and the particle size is submicron; the amount of humic acid added is 1% of the weight of the silicon nitride powder; the purity of silicon dioxide is ≥99.99%, and the particle size is It is submicron, the mass ratio of silicon dioxide and silicon nitride magnesium is 1:9, and the addition amount of the two is 1% of the weight of the silicon nitride powder; the addition amount of carboxymethyl cellulose is 1% of the silicon nitride powder 3‰ of the weight; the amount of solvent added is 50% of the weight of the silicon nitride powder, and the solvent is a mixture of water and ethanol with a volume fraction ≥ 95% in a volume rat...
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