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A high-temperature temperature and pressure optical fiber Fabry-Perot composite micro-nano sensor

A technology of temperature sensor and pressure sensor, applied in thermometers, thermometers with physical/chemical changes, fluid pressure measurement using optical methods, etc., can solve the problems of double-parameter cross-sensitivity, low temperature resistance limit, etc., to improve high temperature resistance Extreme, small size effect

Active Publication Date: 2018-04-13
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide a high-temperature temperature and pressure optical fiber Fabry-Perot composite micro-nano sensor to solve the problems of low temperature resistance limit and double-parameter cross-sensitivity in the composite measurement of temperature and pressure in a high-temperature environment.

Method used

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  • A high-temperature temperature and pressure optical fiber Fabry-Perot composite micro-nano sensor
  • A high-temperature temperature and pressure optical fiber Fabry-Perot composite micro-nano sensor
  • A high-temperature temperature and pressure optical fiber Fabry-Perot composite micro-nano sensor

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Embodiment

[0026] A kind of high temperature temperature and pressure optical fiber Fabry Perot composite micro-nano sensor of the present invention, its structure is as follows figure 1 As shown, it includes fiber access section 1, pressure sensor section 2, and temperature sensor section 3, which are connected in sequence, and is made of an endless single-mode photonic crystal fiber; fiber access section 1 is used to continuously introduce broadband optical signals into high-temperature environments The multifunctional sensor in the sensor will feed back the modulated signal; the pressure sensor section 2 is used to modulate the optical signal under high temperature and pressure, and the temperature sensor section 3 is used to modulate the optical signal under high temperature;

[0027] processing methods:

[0028] Take two sections of uncut single-mode photonic crystal fiber of appropriate length, and use laser to process a cylindrical microcavity along the axis on one end face of the...

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Abstract

The invention relates to a high-temperature temperature and pressure optical fiber Fabry-Perot composite micro-nano sensor, which belongs to the technical field of optical fiber sensors. The sensor of the present invention comprises an optical fiber access section, a pressure sensor section and a temperature sensor section; the optical fiber access section is a solid-core optical fiber, the pressure sensor is a hollow-core thin-walled optical fiber, and the temperature sensor is another section of solid-core optical fiber; the present invention adopts The femtosecond laser processing method processes a cylindrical hole on the end face of two solid-core optical fibers, and then welds them to form a FP interference-type pressure chamber. One of the optical fibers is used as an optical fiber access section, and the other is cut. The optical fiber is ground into a section of solid-core optical fiber with a certain thickness to form a temperature sensor, and the decoupling of the two-parameter measurement is realized by controlling the cavity length difference between the temperature sensor and the pressure sensor. Compared with the prior art, the invention has the advantages of small structure size, high temperature resistance, simultaneous temperature / pressure measurement and no double parameter cross sensitivity.

Description

technical field [0001] The invention relates to a micro-nano sensor, in particular to a high-temperature temperature and pressure optical fiber Fabry-Perot (Fabry-Perot) composite micro-nano sensor, which belongs to the technical field of optical fiber sensors. Background technique [0002] The detection of temperature and pressure is widely used in various fields of the national economy. Simultaneously monitoring parameters such as temperature and pressure in a high-temperature environment can make a comprehensive evaluation of the operation of the system. In many application environments with high temperature (greater than 800°C), strong electromagnetic interference, and small size, current sensors cannot meet these extreme requirements, and fiber optic sensors can effectively solve these problems because of their inherent high temperature resistance, anti-electromagnetic interference, and small size. question. [0003] Existing optical fiber pressure sensors for high-tem...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K11/32G01L11/02
Inventor 姜澜江毅曹志涛王素梅刘达
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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