A high-temperature temperature and pressure optical fiber Fabry-Perot composite micro-nano sensor

Abstract

The invention relates to a high-temperature temperature and pressure optical fiber Fabry-Perot composite micro-nano sensor, which belongs to the technical field of optical fiber sensors. The sensor of the present invention comprises an optical fiber access section, a pressure sensor section and a temperature sensor section; the optical fiber access section is a solid-core optical fiber, the pressure sensor is a hollow-core thin-walled optical fiber, and the temperature sensor is another section of solid-core optical fiber; the present invention adopts The femtosecond laser processing method processes a cylindrical hole on the end face of two solid-core optical fibers, and then welds them to form a FP interference-type pressure chamber. One of the optical fibers is used as an optical fiber access section, and the other is cut. The optical fiber is ground into a section of solid-core optical fiber with a certain thickness to form a temperature sensor, and the decoupling of the two-parameter measurement is realized by controlling the cavity length difference between the temperature sensor and the pressure sensor. Compared with the prior art, the invention has the advantages of small structure size, high temperature resistance, simultaneous temperature / pressure measurement and no double parameter cross sensitivity.

Description

technical field [0001] The invention relates to a micro-nano sensor, in particular to a high-temperature temperature and pressure optical fiber Fabry-Perot (Fabry-Perot) composite micro-nano sensor, which belongs to the technical field of optical fiber sensors. Background technique [0002] The detection of temperature and pressure is widely used in various fields of the national economy. Simultaneously monitoring parameters such as temperature and pressure in a high-temperature environment can make a comprehensive evaluation of the operation of the system. In many application environments with high temperature (greater than 800°C), strong electromagnetic interference, and small size, current sensors cannot meet these extreme requirements, and fiber optic sensors can effectively solve these problems because of their inherent high temperature resistance, anti-electromagnetic interference, and small size. question. [0003] Existing optical fiber pressure sensors for high-tem...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a high-temperature temperature and pressure optical fiber Fabry-Perot composite micro-nano sensor to solve the problems of low temperature resistance limit and double-parameter cross-sensitivity in the composite measurement of temperature and pressure in a high-temperature environment.

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