Composite barrier structure with self-healing ability

A technology with functional structure and capability, which is applied in the field of electroluminescent device preparation, can solve the problems of reducing the display quality and service life of OLED devices, unsatisfactory water and oxygen barrier effects, and degraded OLED devices, etc., achieving excellent water and oxygen barrier properties, good Good performance, uniformity and compactness

Active Publication Date: 2017-11-10
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Most of its components are organic, so it is particularly sensitive to any traces of moisture and oxygen in the space. Moisture and oxygen will degrade the components of OLED devices, especially weaken its luminous ability, and seriously reduce the display of OLED devices. Therefore, the effective packaging of OLED devices is the key technology for its industrialization and flexible display, but the water and oxygen barrier effect of the currently prepared packaging structure is not ideal.

Method used

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  • Composite barrier structure with self-healing ability
  • Composite barrier structure with self-healing ability
  • Composite barrier structure with self-healing ability

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] In this example, see figure 1 , a composite barrier structure with self-healing ability, has multiple functional structural layers, including sequentially stacking base Al on the substrate 1 2 o 3 Layer 2, Middle Aluminum Layer 3, Middle Al 2 o 3 Layer 4 and the outer dense structure layer, substrate 1 adopts polyimide PI flexible substrate, base Al 2 o 3 Layer 2 constitutes the first barrier layer, and the outer dense structure layer is the outer Al 2 o 3 Thin film layer 5, the outer dense structure layer can block the penetration of water and oxygen molecules, the middle Al 2 o 3 Layer 4 and the outer dense structure layer together constitute the second barrier layer, and the pure aluminum layer 3 is used as a repair agent layer, which can 2 o 3 Layer 2 and middle Al 2 o 3 When gap defects appear in layer 4, Al atoms are provided, and Al atoms are spontaneously oxidized at the defects to form Al 2 o 3 , to fill in the corresponding defects.

[0031] In t...

Embodiment 2

[0051] This embodiment is basically the same as Embodiment 1, especially in that:

[0052] In this example, see figure 2 , the outer dense structure layer is the outer SiN X Layer 6. The difference between this example and Example 1 is that the top barrier layer uses PECVD to prepare SiN X Layer 6, SiN prepared by PECVD X It also has good barrier properties, and the combination of the two further enhances the water and oxygen barrier properties.

Embodiment 3

[0054] This embodiment is basically the same as the previous embodiment, and the special features are:

[0055] In this example, see image 3 , the outer dense structure layer is the outer SiO 2 Layer 7. The difference between this example and the previous examples is that the topmost barrier layer uses PECVD to prepare SiO 2 Layer 7, SiO prepared by PECVD 2 It also has good barrier properties, and the combination of the two further enhances the water and oxygen barrier properties.

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Abstract

The invention discloses a composite barrier structure with self-healing ability, which has a plurality of functional structural layers, including a base Al2O3 layer, a middle aluminum layer, a middle Al2O3 layer and an outer dense structure layer, and a basic Al2O3 layer on a substrate. Constitute the first barrier layer, the outer dense structure layer can block the penetration of water and oxygen molecules, the middle Al2O3 layer and the outer dense structure layer together form the second barrier layer, the pure aluminum layer is used as a repair agent layer, and can be used on the superimposed base Al2O3 layer Al atoms are provided when there are gap defects in the Al2O3 layer and the middle part, and Al2O3 is spontaneously oxidized at the defect to fill the corresponding defect. The multi-layer composite structure of the composite water-oxygen barrier layer of the present invention not only has excellent water-oxygen barrier properties, but also has good repeated bending performance and self-repairing ability after defect formation. It has broad application prospects in terms of promotion.

Description

technical field [0001] The invention relates to an electronic device packaging structure, in particular to an organic electroluminescent device packaging structure, which is applied in the technical field of electroluminescent device preparation. Background technique [0002] Compared with inorganic electroluminescent devices, organic electroluminescent devices (Organic Light Emitting Device, OLED) have a wide range of material selection, can realize full-color display from blue to red regions, low driving voltage, luminous brightness and luminous It has many advantages such as high efficiency, wide viewing angle, fast response speed, relatively simple production process, low cost, and flexible display. Therefore, it has developed rapidly in the past 20 years, and related industries are already in the initial stage of industrialization. Electromechanical luminescent devices are generally considered to be the mainstream of next-generation display devices. [0003] OLED is a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/52
CPCH10K50/844
Inventor 张建华张帅陈龙龙
Owner SHANGHAI UNIV
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